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<div class="">VINSE is in the process of relocating a PECVD reactor to a new cleanroom facility and I am seeking advice on the industry standards for decommissiong Silane and Phosphene stainless gas delivery lines that run from the respective gas cabinets to
the tool in its current location. Beyond thoroughly purging the lines with nitrogen flow through the tool and exhausting the purge gas through the tool exhaust, are there other considerations involved in abandoning the gas delivery lines? For example, are
the lines considered to be permanently contaminated and will they require special disposal?</div>
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<div class="">Any advice on decommissioning these lines will be deeply appreciated.</div>
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<div class="">With thanks,</div>
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Anthony B Hmelo, PhD</div>
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<div class="">Associate Director, VINSE</div>
<div class="">Research Associate Professor of Physics and Astronomy</div>
<div class="">Research Associate Professor of Materials Science and Engineering</div>
<div class="">Vanderbilt University</div>
<div class="">Nashville TN 37235</div>
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<div class="">615-343-7212<br class="">
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