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<p class="MsoNormal"><span style="color:#1F497D">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">At Draper we have 2 sputter tools for metals, KDF954 (Dc Mag with RF Sputter Clean) and a Lesker Research tool (co-sputter up to 3 targets, DF, RF and Reactive with RF sputter etch). We allow Zirconium in both
tools and we used DC mag to sputter the material. Your operation would consider our sputter tool to be ‘Dirty” as we deposit most of the materials you listed.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">When we develop a new material we use the Lesker before investing in a KDF target.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We did not see any adverse effects from the sputter of Zirconium. If you are going to use a sputter clean then it is advisable to coat the chamber and platens with the Zirconium so that you do not cross contaminate
your film on the wafer. We do that as a standard procedure.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Vlahakis, James<br>
<b>Sent:</b> Monday, September 26, 2016 10:09 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] DC sputtering Zr<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Hi everyone, one of our users here at the Tufts Micro/Nano Fab would like to DC sputter Zirconium. We have two capable instruments –<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span lang="EN-CA" style="color:#1F497D"><span style="mso-list:Ignore">1.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-CA" style="color:#1F497D">Our “dirty” sputter tool – allowed materials are Cr, Au, Cu, Ti, Ag, Zn, Al, ITO, Ge and various (fully cured) polymers that are popular with our biomedical users<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span lang="EN-CA" style="color:#1F497D"><span style="mso-list:Ignore">2.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-CA" style="color:#1F497D">Our “clean” sputter tool which has a more restrictive material list and is typically used for reactive and RF sputtering.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">I’m inclined to allow Zr sputtering in our dirty tool but hope to hear others’ experience before making a decision. Are there special considerations? Contamination concerns?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">Thanks for your help<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="color:#1F497D">jim<o:p></o:p></span></p>
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