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<p>The power is relative to the target material.</p>
<p>Also the surface roughness will have a bearing on how well the sputtered material holds onto the surrounding chamber parts or flakes off.</p>
<p>Most metals, we run around 200 to 300 watts. If a previous compound has been sputtered and the fixtures have not been cleaned or changed,</p>
<p>flaking will also become an issue.</p>
<p>Good luck.<br>
</p>
<p><br>
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<p><span style="color: black;"><font face="Calibri">Mark Hofheins</font></span></p>
<p><a id="LPNoLP" href="mailto:mhofheins@unm.edu"><span style="color: rgb(5, 99, 193);"><font face="Calibri">mhofheins@unm.edu</font></span></a></p>
<p><span style="color: black;"><font face="Calibri">505-710-3527</font></span></p>
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<p><span style="color: black;">Micro Electronics Technician</span><span style="color: black;"><font face="Calibri"> </font></span></p>
<p><span style="color: black;"><font face="Calibri">Manufacturing Engineering </font>
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<p><span style="color: black;"><font face="Calibri">University of New Mexico MTTC
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<p><span style="color: black;"><font face="Calibri">800 Bradbury S.E.<span> </span>
Suit 235</font></span></p>
<p><span style="color: black;"><font face="Calibri">Albuquerque, New Mexico</font></span></p>
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<div id="divRplyFwdMsg" dir="ltr"><font color="#000000" face="Calibri, sans-serif" style="font-size: 11pt;"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Chang, Long <lvchang@Central.UH.EDU><br>
<b>Sent:</b> Tuesday, October 11, 2016 5:24 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] DC sputtering of ITO</font>
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<div>Hi All,
<div><br>
</div>
<div>We have a DC magnetron sputtering system using 2” diameter targets. We’ve been observing many shorts due to severe flaking. The student is using a recipe developed by her predecessor which uses 100W of DC power and 5 mTorr of Ar. Does anyone know what
steps should be taken to avoid/reduce flaking when DC sputtering ITO? I suspect that the student is using too much power.</div>
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</div>
<div>Thanks,</div>
<div><span style="orphans: 2; widows: 2;">Long Chang</span></div>
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<div>Nanofab Manager</div>
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<div>University of Houston</div>
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<div>Houston, TX 77204-5062</div>
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