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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Are you bead blasting all your shields and shutter. We have 3” targets and use a 100W max power. I suspect that you should be a little lower than that. We
get our targets from Kurt J. Lesker. They could give you a recommendation for you 2 “. You could deposit an adhesion layer of Ti on your shields before using the ITO.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#1F497D">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#1F497D">Peter Janney<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#333333"><img width="224" height="45" id="Picture_x0020_1" src="cid:image001.png@01D22463.AEAD7050" alt="The Ohio State University"><br>
</span><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BB0000;background:white">Peter Janney</span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#333333"><br>
Lab Services Coordinator<br>
</span><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#BB0000;background:white">Nanotech West Lab</span><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#333333"> <br>
100 Science Village, 1381 Kinnear Road, Columbus, OH 43212<br>
614-688-4213 Office<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#333333">614-753-3926 Cell<br>
<a href="mailto:janney.9@osu.edu"><span style="color:blue;background:white">janney.9@osu.edu</span></a> <a href="http://nanotech.osu.edu/"><span style="color:blue;background:white">nanotech.osu.edu</span></a></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> Tuesday, October 11, 2016 7:25 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] DC sputtering of ITO<o:p></o:p></span></p>
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<p class="MsoNormal">Hi All,<o:p></o:p></p>
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<p class="MsoNormal">We have a DC magnetron sputtering system using 2” diameter targets. We’ve been observing many shorts due to severe flaking. The student is using a recipe developed by her predecessor which uses 100W of DC power and 5 mTorr of Ar. Does
anyone know what steps should be taken to avoid/reduce flaking when DC sputtering ITO? I suspect that the student is using too much power.<o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal">Long Chang<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:black">Nanofab Manager<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:black">University of Houston<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:black">3605 Cullen Blvd, Entrance 14<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:black">Room E1007A, SERC Bldg 545<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif;color:black">Houston, TX 77204-5062<o:p></o:p></span></p>
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