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<p class="MsoNormal">Hi,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to introduce myself, I am Esta Abelev a Technical Director of Nanoscale Fabrication facility at University of Pittsburgh.
<o:p></o:p></p>
<p class="MsoNormal">Recently, I received request to etch following materials (see below table), that I have never worked with. I wanted to ask the community if somebody have an experience with those materials and how the best way to etch it.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Need to etch the polymer electrolyte (salt concentration is 2.5 mM based on the volume of Ionic liquid. And PEGDA/IL is 60/40 wt.%) on the silicon substrate except those areas protected by metal. The chemical formulas for these materials
are as follows:<span style="font-size:12.0pt"><o:p></o:p></span></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="1057" style="width:453.0pt;border-collapse:collapse">
<tbody>
<tr style="height:14.4pt">
<td width="630" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph"><b>Name </b><o:p></o:p></p>
</td>
<td width="427" nowrap="" valign="top" style="width:183.0pt;border:solid windowtext 1.0pt;border-left:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph"><b>Chemical Formula</b><o:p></o:p></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="630" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">Polyethylene glycol dicrylate<o:p></o:p></p>
</td>
<td width="427" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">CH2CHCO(C2H4O)nCOOCHCH2<o:p></o:p></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="630" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">1-butyl-3-methylimiadazolium tetrafluoroborate <o:p></o:p></p>
</td>
<td width="427" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">C8H15BF4N2<o:p></o:p></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="630" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">Silver tetrafluoroborate<o:p></o:p></p>
</td>
<td width="427" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">AgBF4<o:p></o:p></p>
</td>
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<tr style="height:14.4pt">
<td width="630" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">2-Hydroxy-2-methylpropiophenone<o:p></o:p></p>
</td>
<td width="427" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">C10H12O2<o:p></o:p></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Thank you, Esta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">…………………………………………………………………………………………………………………………………………………………………..<o:p></o:p></p>
<p class="MsoNormal">Dr. Esta Abelev<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Technical Director of PINSE/NFCF<o:p></o:p></p>
<p class="MsoNormal"><b><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Petersen Institute of NanoScience and Engineering (PINSE)<o:p></o:p></span></b></p>
<p class="MsoNormal"><i><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Nanoscale Fabrication and Characterization Facility (<a href="http://www.nano.pitt.edu/facilities" title="Facilities"><span style="color:windowtext;text-decoration:none">NFCF</span></a>)</span></i><i><o:p></o:p></i></p>
<p class="MsoNormal">University of Pittsburgh<o:p></o:p></p>
<p class="MsoNormal">636 Benedum Hall<o:p></o:p></p>
<p class="MsoNormal">3700 O’Hara Street<o:p></o:p></p>
<p class="MsoNormal">Pittsburgh, PA 15261<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Phone: 412-383-4096<o:p></o:p></p>
<p class="MsoNormal">Email:<span style="color:#17365D"> <a href="mailto:eabelev@pitt.edu">
<span style="color:#0066CC;text-decoration:none">eabelev@pitt.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal">Office: M104 Benedum Hall<o:p></o:p></p>
<p class="MsoNormal"><span style="color:#17365D"><a href="http://www.nano.pitt.edu"><span style="color:#0066CC;text-decoration:none">http://www.nano.pitt.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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