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<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Hi Esta,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">First I have to say I haven’t worked directly with the materials you named.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">But in general for materials #1 and 4 as they are pure hydrocarbons you can etch them with O2 plasma. This should remove all organic materials.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">For B-containing material you need to add something like fluoride (CHF3 or equivalent) to O2, you may need to look for an optimum mixture ratio.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">The one with silver would be the trickiest: if I were you I would try Cl2+O2,
</span><span style="color:#1F497D">hoping you get AgClO3 as an etching product which is volatile.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">My simple approach to RIE in general is to look at possible etching products and their melting, boiling temperatures and take the gas which gives you the lowest temperature (this must definitely be below 500°C).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">As an example etching InP in Cl2- chemistry results in an etching product of InCl3 which has a melting point of 583°C at 1 atm. We know in RIE you need to heat the table to something like 150-200°C and at pressure
like 4 mTorr then nCl3 becomes volatile. You may want to look at a tutorial paper I published 2 years ago:
<a href="http://iopscience.iop.org/article/10.1088/0022-3727/47/23/233501">http://iopscience.iop.org/article/10.1088/0022-3727/47/23/233501</a>
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Good luck,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Email: <a href="mailto:fouad.karouta@anu.edu.au">
<span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://anff-act.anu.edu.au/"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Abelev, Esta<br>
<b>Sent:</b> Friday, 14 October 2016 3:53 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Project Feasibility for RIE<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">I would like to introduce myself, I am Esta Abelev a Technical Director of Nanoscale Fabrication facility at University of Pittsburgh.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Recently, I received request to etch following materials (see below table), that I have never worked with. I wanted to ask the community if somebody have an experience with those materials and how the best way to etch
it. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Need to etch the polymer electrolyte (salt concentration is 2.5 mM based on the volume of Ionic liquid. And PEGDA/IL is 60/40 wt.%) on the silicon substrate except those areas protected by metal. The chemical formulas
for these materials are as follows:</span><span lang="EN-US" style="font-size:12.0pt"><o:p></o:p></span></p>
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<p class="MsoListParagraph"><b>Name </b><o:p></o:p></p>
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<p class="MsoListParagraph"><b>Chemical Formula</b><o:p></o:p></p>
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<p class="MsoListParagraph">Polyethylene glycol dicrylate<o:p></o:p></p>
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<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">CH2CHCO(C2H4O)nCOOCHCH2<o:p></o:p></p>
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<p class="MsoListParagraph">1-butyl-3-methylimiadazolium tetrafluoroborate <o:p></o:p></p>
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<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">C8H15BF4N2<o:p></o:p></p>
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<p class="MsoListParagraph">Silver tetrafluoroborate<o:p></o:p></p>
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<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">AgBF4<o:p></o:p></p>
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<p class="MsoListParagraph">2-Hydroxy-2-methylpropiophenone<o:p></o:p></p>
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<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">C10H12O2<o:p></o:p></p>
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</tbody>
</table>
<p class="MsoNormal"><span lang="EN-US"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thank you, Esta<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">…………………………………………………………………………………………………………………………………………………………………..<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Dr. Esta Abelev<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Technical Director of PINSE/NFCF<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Petersen Institute of NanoScience and Engineering (PINSE)<o:p></o:p></span></b></p>
<p class="MsoNormal"><i><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Nanoscale Fabrication and Characterization Facility (<a href="http://www.nano.pitt.edu/facilities" title="Facilities"><span style="color:windowtext;text-decoration:none">NFCF</span></a>)</span></i><i><span lang="EN-US"><o:p></o:p></span></i></p>
<p class="MsoNormal"><span lang="EN-US">University of Pittsburgh<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">636 Benedum Hall<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">3700 O’Hara Street<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Pittsburgh, PA 15261<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Phone: 412-383-4096<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Email:<span style="color:#17365D"> <a href="mailto:eabelev@pitt.edu">
<span style="color:#0066CC;text-decoration:none">eabelev@pitt.edu</span></a><o:p></o:p></span></span></p>
<p class="MsoNormal"><span lang="EN-US">Office: M104 Benedum Hall<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#17365D"><a href="http://www.nano.pitt.edu"><span style="color:#0066CC;text-decoration:none">http://www.nano.pitt.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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