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<p class="MsoNormal">Hello,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I checked with our RIE chemist. He does not have direct experience with these chemicals but offered the following comments.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#2E75B6;mso-style-textfill-fill-color:#2E75B6;mso-style-textfill-fill-alpha:100.0%">Based on the formula, the film is a solid polymer (CH2CHCO(C2H4O)nCOOCHCH2) blended with the ionic liquids (C8H15BF4N2+ AgBF4+ C10H12O2)
inside. It is a Carbon based film, so normal Oxygen plasma should etch it. The concern is if the small molecular organic compounds (C8H15BF4N2 and C10H12O2) will vaporize inside the high vacuum plasma chamber which may change the electrolyte chemical composition
and contaminate the plasma system.<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best,<o:p></o:p></p>
<p class="MsoNormal">Vince Luciani<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="http://www.cnst.nist.gov/"><span style="color:blue">Center for Nanoscale Science and Technology</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">+1-301-975-2886<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Trebuchet MS",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Abelev, Esta<br>
<b>Sent:</b> Thursday, October 13, 2016 12:53 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Project Feasibility for RIE<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hi,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to introduce myself, I am Esta Abelev a Technical Director of Nanoscale Fabrication facility at University of Pittsburgh.
<o:p></o:p></p>
<p class="MsoNormal">Recently, I received request to etch following materials (see below table), that I have never worked with. I wanted to ask the community if somebody have an experience with those materials and how the best way to etch it.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Need to etch the polymer electrolyte (salt concentration is 2.5 mM based on the volume of Ionic liquid. And PEGDA/IL is 60/40 wt.%) on the silicon substrate except those areas protected by metal. The chemical formulas for these materials
are as follows:<span style="font-size:12.0pt"><o:p></o:p></span></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="604" style="width:453.0pt;border-collapse:collapse">
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<p class="MsoListParagraph"><b>Name </b><o:p></o:p></p>
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<p class="MsoListParagraph"><b>Chemical Formula</b><o:p></o:p></p>
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<p class="MsoListParagraph">Polyethylene glycol dicrylate<o:p></o:p></p>
</td>
<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">CH2CHCO(C2H4O)nCOOCHCH2<o:p></o:p></p>
</td>
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<p class="MsoListParagraph">1-butyl-3-methylimiadazolium tetrafluoroborate <o:p></o:p></p>
</td>
<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">C8H15BF4N2<o:p></o:p></p>
</td>
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<tr style="height:14.4pt">
<td width="360" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">Silver tetrafluoroborate<o:p></o:p></p>
</td>
<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">AgBF4<o:p></o:p></p>
</td>
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<tr style="height:14.4pt">
<td width="360" nowrap="" valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">2-Hydroxy-2-methylpropiophenone<o:p></o:p></p>
</td>
<td width="244" nowrap="" valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="MsoListParagraph">C10H12O2<o:p></o:p></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Thank you, Esta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">…………………………………………………………………………………………………………………………………………………………………..<o:p></o:p></p>
<p class="MsoNormal">Dr. Esta Abelev<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Technical Director of PINSE/NFCF<o:p></o:p></p>
<p class="MsoNormal"><b><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Petersen Institute of NanoScience and Engineering (PINSE)<o:p></o:p></span></b></p>
<p class="MsoNormal"><i><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Nanoscale Fabrication and Characterization Facility (<a href="http://www.nano.pitt.edu/facilities" title="Facilities"><span style="color:windowtext;text-decoration:none">NFCF</span></a>)</span><o:p></o:p></i></p>
<p class="MsoNormal">University of Pittsburgh<o:p></o:p></p>
<p class="MsoNormal">636 Benedum Hall<o:p></o:p></p>
<p class="MsoNormal">3700 O’Hara Street<o:p></o:p></p>
<p class="MsoNormal">Pittsburgh, PA 15261<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Phone: 412-383-4096<o:p></o:p></p>
<p class="MsoNormal">Email:<span style="color:#17365D"> <a href="mailto:eabelev@pitt.edu">
<span style="color:#0066CC;text-decoration:none">eabelev@pitt.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal">Office: M104 Benedum Hall<o:p></o:p></p>
<p class="MsoNormal"><span style="color:#17365D"><a href="http://www.nano.pitt.edu"><span style="color:#0066CC;text-decoration:none">http://www.nano.pitt.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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