<div dir="ltr">I agree with Vince on the contamination of the vacuum plasma chamber. In addition to just the volatile components, how pure were the components prior to mixing? You may have other metals/ions in the material, that could contaminate your chamber, and cause changes in the plasma.<div><br></div><div>Rob</div></div><div class="gmail_extra"><br><div class="gmail_quote">On Mon, Oct 17, 2016 at 10:59 AM, Luciani, Vincent (Fed) <span dir="ltr"><<a href="mailto:Vincent.Luciani@nist.gov" target="_blank">Vincent.Luciani@nist.gov</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
<div lang="EN-US" link="#0563C1" vlink="#954F72">
<div class="m_2773653168918179397WordSection1">
<p class="MsoNormal">Hello,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">I checked with our RIE chemist. He does not have direct experience with these chemicals but offered the following comments.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span style="color:#2e75b6">Based on the formula, the film is a solid polymer (CH2CHCO(C2H4O)nCOOCHCH2) blended with the ionic liquids (C8H15BF4N2+ AgBF4+ C10H12O2)
inside. It is a Carbon based film, so normal Oxygen plasma should etch it. The concern is if the small molecular organic compounds (C8H15BF4N2 and C10H12O2) will vaporize inside the high vacuum plasma chamber which may change the electrolyte chemical composition
and contaminate the plasma system.<u></u><u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Best,<u></u><u></u></p>
<p class="MsoNormal">Vince Luciani<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Vincent K. Luciani<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">NanoFab Manager<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="http://www.cnst.nist.gov/" target="_blank"><span style="color:blue">Center for Nanoscale Science and Technology</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">National Institute of Standards and Technology<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">100 Bureau Drive, MS 6201<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Gaithersburg, MD 20899-6200 USA<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="tel:%2B1-301-975-2886" value="+13019752886" target="_blank">+1-301-975-2886</a><u></u><u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Trebuchet MS",sans-serif"><u></u> <u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<div>
<div style="border:none;border-top:solid #e1e1e1 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><span class=""><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> [mailto:<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@<wbr>mtl.mit.edu</a>]
<b>On Behalf Of </b>Abelev, Esta<br>
</span><b>Sent:</b> Thursday, October 13, 2016 12:53 PM<span class=""><br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Project Feasibility for RIE<u></u><u></u></span></p>
</div>
</div>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Hi,<u></u><u></u></p><div><div class="h5">
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">I would like to introduce myself, I am Esta Abelev a Technical Director of Nanoscale Fabrication facility at University of Pittsburgh.
<u></u><u></u></p>
<p class="MsoNormal">Recently, I received request to etch following materials (see below table), that I have never worked with. I wanted to ask the community if somebody have an experience with those materials and how the best way to etch it.
<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Need to etch the polymer electrolyte (salt concentration is 2.5 mM based on the volume of Ionic liquid. And PEGDA/IL is 60/40 wt.%) on the silicon substrate except those areas protected by metal. The chemical formulas for these materials
are as follows:<span style="font-size:12.0pt"><u></u><u></u></span></p>
<table class="m_2773653168918179397MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="604" style="width:453.0pt;border-collapse:collapse">
<tbody>
<tr style="height:14.4pt">
<td width="360" nowrap valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph"><b>Name </b><u></u><u></u></p>
</td>
<td width="244" nowrap valign="top" style="width:183.0pt;border:solid windowtext 1.0pt;border-left:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph"><b>Chemical Formula</b><u></u><u></u></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="360" nowrap valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">Polyethylene glycol dicrylate<u></u><u></u></p>
</td>
<td width="244" nowrap valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">CH2CHCO(C2H4O)nCOOCHCH2<u></u><u></u></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="360" nowrap valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">1-butyl-3-methylimiadazolium tetrafluoroborate <u></u><u></u></p>
</td>
<td width="244" nowrap valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">C8H15BF4N2<u></u><u></u></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="360" nowrap valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">Silver tetrafluoroborate<u></u><u></u></p>
</td>
<td width="244" nowrap valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">AgBF4<u></u><u></u></p>
</td>
</tr>
<tr style="height:14.4pt">
<td width="360" nowrap valign="top" style="width:270.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">2-Hydroxy-2-<wbr>methylpropiophenone<u></u><u></u></p>
</td>
<td width="244" nowrap valign="top" style="width:183.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:14.4pt">
<p class="m_2773653168918179397MsoListParagraph">C10H12O2<u></u><u></u></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"> <u></u><u></u></p>
<p class="MsoNormal">Thank you, Esta<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">………………………………………………………………………………<wbr>………………………………………………………………………………<wbr>…..<u></u><u></u></p>
<p class="MsoNormal">Dr. Esta Abelev<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Technical Director of PINSE/NFCF<u></u><u></u></p>
<p class="MsoNormal"><b><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Petersen Institute of NanoScience and Engineering (PINSE)<u></u><u></u></span></b></p>
<p class="MsoNormal"><i><span lang="EN" style="font-size:9.5pt;font-family:"Verdana",sans-serif">Nanoscale Fabrication and Characterization Facility (<a href="http://www.nano.pitt.edu/facilities" title="Facilities" target="_blank"><span style="color:windowtext;text-decoration:none">NFCF</span></a>)</span><u></u><u></u></i></p>
<p class="MsoNormal">University of Pittsburgh<u></u><u></u></p>
<p class="MsoNormal">636 Benedum Hall<u></u><u></u></p>
<p class="MsoNormal">3700 O’Hara Street<u></u><u></u></p>
<p class="MsoNormal">Pittsburgh, PA 15261<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Phone: <a href="tel:412-383-4096" value="+14123834096" target="_blank">412-383-4096</a><u></u><u></u></p>
<p class="MsoNormal">Email:<span style="color:#17365d"> <a href="mailto:eabelev@pitt.edu" target="_blank">
<span style="color:#0066cc;text-decoration:none">eabelev@pitt.edu</span></a><u></u><u></u></span></p>
<p class="MsoNormal">Office: M104 Benedum Hall<u></u><u></u></p>
<p class="MsoNormal"><span style="color:#17365d"><a href="http://www.nano.pitt.edu" target="_blank"><span style="color:#0066cc;text-decoration:none">http://www.nano.pitt.edu</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:black"><u></u> <u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
</div></div></div>
</div>
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<br></blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div dir="ltr">Robert W. Hower, Ph.D.<div>The University of Michigan, Lurie Nanofabrication Facility</div><div>1301 Beal Ave, 1234A EECS</div><div>Ann Arbor, MI 48109</div><div>734-827-4370</div></div></div></div></div></div>
</div>