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<font class="Apple-style-span" face="Georgia" size="2">Hi,</font></div>
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<font class="Apple-style-span" color="#103ffb" face="Georgia" size="2" style="color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px;">I have a user would like to sputter 2-3 micron thick AuSn using our Intlvac Sputter coater.</font></div>
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<font class="Apple-style-span" color="#103ffb" face="Georgia" size="2" style="color: rgb(0, 0, 0); font-family: Helvetica; font-size: 12px;">Does anyone have experience with this process and can also comment on any contamination issues that might cause problems
for other processes?</font></div>
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The sputterer is currently used to coat Al, SiN, SiO.</div>
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If you could also suggest other deposition techniques that will work to coat AuSn.</div>
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Thanks for your help.</div>
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Regards</div>
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Aju</div>
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<font class="Apple-style-span" color="#103ffb" face="Georgia" size="2">Aju Jugessur <i>Ph.D.</i><br>
Director, University of Iowa Microfabrication Facility<br>
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<font class="Apple-style-span" color="#103ffb" face="Georgia" size="2">Professor (Adj.), Physics and Astronomy<br>
OSTC, Iowa Advanced Technology Labs<br>
University of Iowa</font></div>
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<font class="Apple-style-span" color="#103ffb" face="Georgia" size="2">205 N. Madison St</font></div>
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<font class="Apple-style-span" color="#103ffb" face="Georgia" size="2">Iowa City, IA 52242<br>
319 -353-2342 <br>
aju-jugessur@uiowa.edu<br>
http://ostc.uiowa.edu/uimf</font></div>
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