<div dir="ltr">Hi Mariusz, <div><br></div><div>We use bone dry 3.0 liquid withdrawal CO2. I can't say that we've ever done any analysis of the benefits of moving to a higher purity. I'd be interested in any comments as well.</div><div><br></div><div>Regards,</div><div>-Mike. </div></div><div class="gmail_extra"><br><div class="gmail_quote">On Fri, Oct 28, 2016 at 2:18 AM, Mariusz Martyniuk <span dir="ltr"><<a href="mailto:mariusz.martyniuk@uwa.edu.au" target="_blank">mariusz.martyniuk@uwa.edu.au</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div lang="EN-AU" link="blue" vlink="purple"><div class="m_6455995240011901567WordSection1"><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Dear LabNetwork,<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">I would like to investigate what purity of CO2 is being used for Critical Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply with a comment if you are using CPD? Did anyone investigate if there are significant benefits of using  5N over 3N purity of CO2? <u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Cheers,<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Marius<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">Mariusz Martyniuk<br></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:black">-----------------------------</span><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"><br></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:black">Associate Professor, ANFF-WA Managing Director<br>Microelectronics Research Group<br>School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018<br>The University of Western Australia<br><a href="http://%20%20" target="_blank"><span style="color:black;text-decoration:none">35 Stirling Highway, Crawley WA 6009, Australia</span></a><br>Tel: <a href="tel:+61%208%206488%201905" target="_blank"><span style="color:black;text-decoration:none">+61 8 6488 1905</span></a>, Fax: <a href="tel:+61%208%206488%201095" target="_blank"><span style="color:black;text-decoration:none">+61 8 6488 1095</span></a><br>Secretary Tel: <a href="tel:+61%208%206488%203801" target="_blank"><span style="color:black;text-decoration:none">+61 8 6488 3801</span></a>, Rm 1.73, <a href="http://www.mrg.uwa.edu.au/" target="_blank">http://www.mrg.uwa.edu.<wbr>au/</a></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u><u></u></span></p></div></div><br>______________________________<wbr>_________________<br>
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