<div dir="ltr"><div>Mariusz Martyniuk<br></div><div><br></div>The UC Berkeley Marvell NanoFabrication Laboratory uses a LCO2 grade sold by Praxair as "ultra high purity:<div><br><div><span style="font-size:12.8px">Praxair p/n: CD 3.0-KS, 3.0, 99.9 purity</span><br></div></div><div><span style="font-size:12.8px"><br></span></div><div><span style="font-size:12.8px">Bob Hamilton</span></div><div><span style="font-size:12.8px">Marvell NanoLab Equipment Manager</span></div></div><div class="gmail_extra"><br clear="all"><div><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div><div><div><div><div><br>Robert Hamilton<br></div>University of CA, Berkeley<br>Marvell NanoLab Equipment Manager<br></div>Rm 520 Sutardja Dai Hall, MC 1754<br></div>Berkeley, CA 94720<br></div>Phone 510-809-8618 (desk - preferred)<br></div>Mobile 510-325-7557 (my personal mobile)<br></div>E-mail preferred: <a href="mailto:bob@eecs.berkeley.edu" target="_blank">bob@eecs.berkeley.edu</a><br><a href="http://nanolab.berkeley.edu/" target="_blank">http://nanolab.berkeley.edu/</a></div><div dir="ltr"><br></div><div dir="ltr"><br><div><div><div><div><div><div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div>
<br><div class="gmail_quote">On Fri, Oct 28, 2016 at 1:18 AM, Mariusz Martyniuk <span dir="ltr"><<a href="mailto:mariusz.martyniuk@uwa.edu.au" target="_blank">mariusz.martyniuk@uwa.edu.au</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div lang="EN-AU" link="blue" vlink="purple"><div class="m_-3460474596135185111WordSection1"><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Dear LabNetwork,<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">I would like to investigate what purity of CO2 is being used for Critical Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply with a comment if you are using CPD? Did anyone investigate if there are significant benefits of using  5N over 3N purity of CO2? <u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Cheers,<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Marius<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black">Mariusz Martyniuk<br></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:black">-----------------------------</span><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:black"><br></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:black">Associate Professor, ANFF-WA Managing Director<br>Microelectronics Research Group<br>School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018<br>The University of Western Australia<br><a href="http://%20%20" target="_blank"><span style="color:black;text-decoration:none">35 Stirling Highway, Crawley WA 6009, Australia</span></a><br>Tel: <a href="tel:+61%208%206488%201905" target="_blank"><span style="color:black;text-decoration:none">+61 8 6488 1905</span></a>, Fax: <a href="tel:+61%208%206488%201095" target="_blank"><span style="color:black;text-decoration:none">+61 8 6488 1095</span></a><br>Secretary Tel: <a href="tel:+61%208%206488%203801" target="_blank"><span style="color:black;text-decoration:none">+61 8 6488 3801</span></a>, Rm 1.73, <a href="http://www.mrg.uwa.edu.au/" target="_blank">http://www.mrg.uwa.edu.<wbr>au/</a></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><u></u><u></u></span></p></div></div><br>______________________________<wbr>_________________<br>
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