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<div style="direction: ltr;font-family: Tahoma;color: #000000;font-size: 10pt;">We use CPD and 5N purity which is standard for most of our gases. We haven't used 3N so I can't comment on differences.<br>
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<p>Cheers!</p>
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<p>Julia Aebersold, Ph.D.</p>
<p>MNTC Cleanroom Manager</p>
<p>University of Louisville</p>
<p>2210 South Brook Street</p>
<p>Shumaker Research Building, Room 233</p>
<p>Louisville, KY 40292</p>
<p>(502) 852-1572</p>
<p><a tabindex="0" href="http://louisville.edu/micronano">http://louisville.edu/micronano/</a></p>
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<div id="divRpF333895" style="direction: ltr;"><font face="Tahoma" size="2" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu [labnetwork-bounces@mtl.mit.edu] on behalf of Mariusz Martyniuk [mariusz.martyniuk@uwa.edu.au]<br>
<b>Sent:</b> Friday, October 28, 2016 4:18 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] CO2 purity for CPD?<br>
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<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri","sans-serif"">Dear LabNetwork,</span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri","sans-serif""> </span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri","sans-serif"">I would like to investigate what purity of CO2 is being used for Critical Point Drying (CPD) of MEMS in various labs. Could I please ask for a reply with a comment if you
are using CPD? Did anyone investigate if there are significant benefits of using 5N over 3N purity of CO2?
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<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri","sans-serif"">Cheers,</span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri","sans-serif"">Marius</span></p>
<p class="MsoNormal"><span style="font-size:11.0pt; font-family:"Calibri","sans-serif""> </span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt; font-family:"Calibri","sans-serif"; color:black">Mariusz Martyniuk<br>
</span><span lang="EN-US" style="font-size:10.0pt; font-family:"Calibri","sans-serif"; color:black">-----------------------------</span><span lang="EN-US" style="font-size:11.0pt; font-family:"Calibri","sans-serif"; color:black"><br>
</span><span lang="EN-US" style="font-size:10.0pt; font-family:"Calibri","sans-serif"; color:black">Associate Professor, ANFF-WA Managing Director<br>
Microelectronics Research Group<br>
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018<br>
The University of Western Australia<br>
<a href="UrlBlockedError.aspx" target="_blank"><span style="color:black; text-decoration:none">35 Stirling Highway, Crawley WA 6009, Australia</span></a><br>
Tel: <a href="tel:+61%208%206488%201905" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 1905</span></a>, Fax: <a href="tel:+61%208%206488%201095" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 1095</span></a><br>
Secretary Tel: <a href="tel:+61%208%206488%203801" target="_blank"><span style="color:black; text-decoration:none">+61 8 6488 3801</span></a>, Rm 1.73, http://www.mrg.uwa.edu.au/</span><span style="font-size:11.0pt; font-family:"Calibri","sans-serif""></span></p>
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