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<p>Good day all,</p>
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<p>We have a Cambridge Nanotech Savannah200, and few days ago we
mounted TEMAHf cylinder.</p>
<p>The system is pumped by a rotary vane pump Pascal2021 with
Fomblin oil. After few processes using TEMAHf and ozone, a large
oil loss has been observed, with oil present in the vessel under
the pump.</p>
<p>Furthermore, HfO2 films resulted with lower refractive index than
expected.</p>
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<p>Are there incompatibility issues of precursors like TEMAHf with
the pump in use?</p>
<p>or are there other issues that we should take into account to
prevent such problem?</p>
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<p>We really approeciate any suggestions you might have</p>
<p>Elena Cianci</p>
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<font size="-1">Elena Cianci, PhD<br>
Research associate</font><font size="-1"><br>
CNR-IMM, Unità di Agrate Brianza
</font><font size="-1"><br>
via C. Olivetti 2</font><font size="-1"><br>
20864 Agrate Brianza (MB), Italy
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