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<font face="Times New Roman, Times, serif">Hi Elena,<br>
<br>
We have the same tools and process here (Harvard CNS), and your
pump/oil should be fine. <br>
<br>
What is your base pressure (with 20 sccm of N2 flowing)? It
should be between 200mT and, say, 500mT. If it is 600mT or
higher, it could well be your pump is dying, and in need of a
rebuild. If base pressure is suddenly higher than previously,
that is particularly suspicious. <br>
<br>
The pump oil is probably leaking from a seal, which can be fixed
with a rebuild. If the pump runs low on oil, that will effect
it's pumping ability. Assuming your exhaust is vented (and well
sealed), it is less likely that the oil is coming out of the
exhaust, (but possible). See if you can tell if the exhaust side
of the pump has a lot of oil in it.<br>
<br>
At CNS, we used to go through pumps at a rather alarming clip
(less than 6 months between rebuilds), due to the creation of
oxide powders in the pump oil </font><font face="Times New Roman,
Times, serif"> (excellent grinding slurry)</font><font face="Times
New Roman, Times, serif">. After we started putting oil mist
traps on our pumps (as an in-line reaction surface), our pumps
starting lasting 2 years or more between rebuilds.<br>
<br>
What temp are you depositing your HfO2 at? Below 240C should give
more consistent results, as above that you start getting close to
the decomposition temperature of the TDMAHf. Also, if your pump
rate is dropping (as evidenced by higher base pressure), you might
find your wait times between pulses is no longer long enough to
keep out of CVD mode (just a bit), which can also effect your
refractive index. <br>
<br>
<br>
Mac Hathaway<br>
<br>
</font>
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style="margin-bottom:0in;margin-bottom:.0001pt"><span
style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">617-495-9012<o:p></o:p></span></p>
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On 11/21/2016 11:23 AM, Elena Cianci wrote:
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<p>Good day all,</p>
<p><br>
</p>
<p>We have a Cambridge Nanotech Savannah200, and few days ago we
mounted TEMAHf cylinder.</p>
<p>The system is pumped by a rotary vane pump Pascal2021 with
Fomblin oil. After few processes using TEMAHf and ozone, a large
oil loss has been observed, with oil present in the vessel under
the pump.</p>
<p>Furthermore, HfO2 films resulted with lower refractive index
than expected.</p>
<p><br>
</p>
<p>Are there incompatibility issues of precursors like TEMAHf with
the pump in use?</p>
<p>or are there other issues that we should take into account to
prevent such problem?</p>
<br>
<p>We really approeciate any suggestions you might have</p>
<p>Elena Cianci</p>
<p><br>
</p>
<p><br>
</p>
<p>--------------------------------------</p>
<font size="-1">Elena Cianci, PhD<br>
Research associate</font><font size="-1"><br>
CNR-IMM, Unità di Agrate Brianza </font><font size="-1"><br>
via C. Olivetti 2</font><font size="-1"><br>
20864 Agrate Brianza (MB), Italy </font><br>
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