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<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Jim<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Santa Clara developed what is now known as the Toxic Gas Ordinance way back in 1988 as a response to the growing number of semiconductor facilities in that area.
It has since been modified and is mostly used as the model for the Universal Fire Code. <u>While no source is definitive</u> and local codes vary – I have found this document:<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://www.sbaypipe.org/assets/pdf/TGO_Toxic_Brochure_single%20pages_0519.pdf"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">http://www.sbaypipe.org/assets/pdf/TGO_Toxic_Brochure_single%20pages_0519.pdf</span></a><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">to be extremely helpful in providing general guidance regarding most standard semiconductor gases. Not only does it cover generally where TGO varies from the
model fire code - There are a lot of good definitions, the general requirements are very easy to follow and the table of gases provides easy access to classifications and IDLH, etc. Again – one needs to cross check against your local requirements, but a
20 minute read can give you an abundance of info regarding what is required throughout much of the US.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Specifically to your question – you can see under the general requirements in the “Exhaust Ventilation System” which class of gasses are required to be “treated”
to ½ IDLH. Under the TGO Synopsis you can see under bullet <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">“S” what is involved in a “treatment system”. I leave it to you to interpret those for your specific application and again – to cross check those requirements
against local codes. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Peter J Duda</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Technical Director, Pritzker Nanofabrication Facility</span><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Institute for Molecular Engineering</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">University of Chicago</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">5640 South Ellis Avenue<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ERC LL178<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Chicago, IL 60637</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Office: 773-702-8903<br>
Pager/Text: 773-652-0480</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">duda@uchicago.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ime.uchicago.edu</span><span style="font-size:13.5pt;font-family:"Segoe UI",sans-serif;color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>James Marsh<br>
<b>Sent:</b> Monday, November 21, 2016 10:15 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Cc:</b> James Marsh (mail.mil) <James.e.marsh14.ctr@mail.mil><br>
<b>Subject:</b> [labnetwork] Exhaust of corrosive chemical storage cabinets<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Hello,
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I would like some feedback regarding the pros/cons of venting corrosive chemical storage cabinets to outdoors. I may be looking at the wrong resources, but after checking NFPA,
SEMI, FM Global, both state and international fire and mechanical codes, I have found only sketchy guidance.
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">I would welcome either ideas or suggestions of where to look for definitive guidance.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Thanks, and have a great day.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Jim<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">James “Jim” Marsh, Contractor<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Facility Manager/Test Coordinator<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">EOIR Technologies, Inc. – A Polaris Company<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Supporting<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">US Army Night Vision and Electronic Sensors Directorate<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Semiconductor Material and Fabrication Research Center
<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">10221 Burbeck Rd.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Ft. Belvoir, VA 22060<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Ph: (703) 704-1778<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Mobile: (703) 498-1279<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> <o:p></o:p></span></p>
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