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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal>Hello All,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>We are looking to relocate our SCS parylene deposition (PDS 2010 Labcoter 2) system to our new cleanroom facility, and it seems wise to consider contamination control in placing this tool. I know that the use of these tools is relatively widespread, and I am wondering how others handle the particles/parylene flakes that are released when the tool is cleaned and maintained. We recently experienced an uptick in use on the tool and began running thicker deposition (on the scale of microns for each deposition), both of which have contributed to particle concerns in the area around the tool. Most of the particle concerns are a result of cleaning the cold trap probe (indicating there may be a better way to do this), but we’ve had to recently tear into the system and unclog the vaporizer line, which also is a pretty dirty process.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>In particular, can anyone comment on the following?<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]>Is your system located in clean space? If so, what is the class designation of its location?<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]>How do you mitigate the risk of particle release during tool maintenance/cleaning?<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thanks!<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Norman Gottron<o:p></o:p></p><p class=MsoNormal>Process Engineer, Carnegie Mellon University Nanofabrication Facility<o:p></o:p></p><p class=MsoNormal>Electrical and Computer Engineering | Carnegie Mellon University<o:p></o:p></p><p class=MsoNormal>5000 Forbes Ave<o:p></o:p></p><p class=MsoNormal>Pittsburgh, PA 15213<o:p></o:p></p><p class=MsoNormal>Phone: 412-268-4205<o:p></o:p></p><p class=MsoNormal>Fax: 412-268-3497<o:p></o:p></p><p class=MsoNormal><a href="http://www.ece.cmu.edu/">www.ece.cmu.edu</a><o:p></o:p></p><p class=MsoNormal><span style='color:#1F497D'><a href="http://www.nanofab.ece.cmu.edu/">www.nanofab.ece.cmu.edu</a></span><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>