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<p class="MsoNormal"><a name="_MailEndCompose"><span style="color:#1F497D">We keep our Parylene coating system in a regular rather than in our cleanroom. It does generate particles, but it can be managed.<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Micro/Nano Technology Center<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">502-852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><span style="color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Norman Gottron<br>
<b>Sent:</b> Tuesday, January 10, 2017 2:10 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] PDS 2010 Labcoter 2 - Contamination Control<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hello All,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are looking to relocate our SCS parylene deposition (PDS 2010 Labcoter 2) system to our new cleanroom facility, and it seems wise to consider contamination control in placing this tool. I know that the use of these tools is relatively
widespread, and I am wondering how others handle the particles/parylene flakes that are released when the tool is cleaned and maintained. We recently experienced an uptick in use on the tool and began running thicker deposition (on the scale of microns for
each deposition), both of which have contributed to particle concerns in the area around the tool. Most of the particle concerns are a result of cleaning the cold trap probe (indicating there may be a better way to do this), but we’ve had to recently tear
into the system and unclog the vaporizer line, which also is a pretty dirty process.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">In particular, can anyone comment on the following?<o:p></o:p></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Is your system located in clean space? If so, what is the class designation of its location?<o:p></o:p></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>How do you mitigate the risk of particle release during tool maintenance/cleaning?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Norman Gottron<o:p></o:p></p>
<p class="MsoNormal">Process Engineer, Carnegie Mellon University Nanofabrication Facility<o:p></o:p></p>
<p class="MsoNormal">Electrical and Computer Engineering | Carnegie Mellon University<o:p></o:p></p>
<p class="MsoNormal">5000 Forbes Ave<o:p></o:p></p>
<p class="MsoNormal">Pittsburgh, PA 15213<o:p></o:p></p>
<p class="MsoNormal">Phone: 412-268-4205<o:p></o:p></p>
<p class="MsoNormal">Fax: 412-268-3497<o:p></o:p></p>
<p class="MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.ece.cmu.edu_&d=AwMFAg&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=O7iQJprHCbCNbQh3IemIlqRLms1ZWC67NLQfSWswpig&s=GiR9QiAfMflZFg1MyfdPejDqtVpQQAo5JB0qohgy9YQ&e=">www.ece.cmu.edu</a><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.ece.cmu.edu_&d=AwMFAg&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=O7iQJprHCbCNbQh3IemIlqRLms1ZWC67NLQfSWswpig&s=KSVfNVvcM5zRVttx-Ei5IpHFg3IXCFXoM_EWef1QcTw&e=">www.nanofab.ece.cmu.edu</a></span><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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