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<p class="MsoNormal">Hi,<o:p></o:p></p>
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<p class="MsoNormal">We recently got a request to sputter Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5.
</sub>Does anyone have an experience sputtering this material, our cleanroom have only one metal sputtering system that usually dedicated to following materials Au, Ti, Nb, NbGe, Al (we are not allowing any magnetic materials in this system). Some users expressed
concerns regarding Sb been a UHV pollutant, any comments? <o:p></o:p></p>
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<p class="MsoNormal">Thank you, Esta<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Atlanta",serif">-----------------------</span><o:p></o:p></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Atlanta",serif">Esta Abelev, PhD</span></b><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Atlanta",serif">Technical Director,<i> </i>Petersen Institute of NanoScience and Engineering </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Atlanta",serif">University of Pittsburgh | 3700 O’Hara Street | 636| Pittsburgh, PA 15261</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Atlanta",serif">412-383-4096 | <a href="mailto:eabelev@pitt.edu"><span style="color:#0066CC;text-decoration:none">eabelev@pitt.edu</span></a> | <a href="https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0"><span style="color:purple;text-decoration:none">nano.pitt.edu</span></a></span><o:p></o:p></p>
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