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<div class="moz-cite-prefix">I have never seen a difference between
baking a few minutes or a few years. Once the solvent is gone,
it's gone. The required dose is insensitive to the bake time. <br>
<br>
Outgassing of the solvent is not a problem. Also, outgassing of
low molecular-weight pmma is not a problem. We are not using UHV
systems for lithography. Systems that use electrostatic deflection
(JEOL) are slightly sensitive to polymer deposition on the
deflection plates, but system diagnostics keep track of distortion
and warn the operator when cleaning is necessary (which is, hardly
ever).<br>
<div class="moz-signature"> <br>
<font size="-2">--------------------------------<br>
Michael Rooks <br>
Yale Institute of Nanoscience and Quantum Engineering <br>
<a href="http://nano.yale.edu">nano.yale.edu</a>
</font>
<br>
<br>
<br>
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On 03/14/2017 11:39 AM, Lino Eugene wrote:<br>
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<p class="MsoNormal">Dear colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to have inputs from you
regarding long prebakes of PMMA before e-beam lithography. I
have always used 180 C for 90 s on hotplate as recommended in
the technical data from Microchem. However, I have seen some
SOPs where the prebake is longer, between 3 min and 20 min. I
am wondering if there is any concern about the anisole solvent
degassing in the vacuum chamber and if some EBL systems are
more sensitive than others.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Also, I am wondering what the impact of a
longer prebake has on the EBL process. I would expect a longer
development time. What about the dose?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you!<o:p></o:p></p>
<p class="MsoNormal"><b><span style="font-family:"Lucida
Calligraphy";mso-fareast-language:EN-CA"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-family:"Lucida
Calligraphy";mso-fareast-language:EN-CA" lang="FR-CA">Lino
Eugene, Ph.D., Jr. Eng.<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-CA"
lang="FR-CA">Quantum NanoFab<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US">N2L 3G1</span><span
style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-CA">Cell:
+1 226-929-1685</span><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:10.5pt;mso-fareast-language:EN-CA"
lang="EN-US">Website:<span style="color:black">
<a moz-do-not-send="true"
href="https://fab.qnc.uwaterloo.ca/">https://fab.qnc.uwaterloo.ca/</a></span></span><span
style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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