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<p class="MsoNormal">Dear colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to have inputs from you regarding long prebakes of PMMA before e-beam lithography. I have always used 180 C for 90 s on hotplate as recommended in the technical data from Microchem. However, I have seen some SOPs where the
prebake is longer, between 3 min and 20 min. I am wondering if there is any concern about the anisole solvent degassing in the vacuum chamber and if some EBL systems are more sensitive than others.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Also, I am wondering what the impact of a longer prebake has on the EBL process. I would expect a longer development time. What about the dose?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you!<o:p></o:p></p>
<p class="MsoNormal"><b><span style="font-family:"Lucida Calligraphy";mso-fareast-language:EN-CA"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span lang="FR-CA" style="font-family:"Lucida Calligraphy";mso-fareast-language:EN-CA">Lino Eugene, Ph.D., Jr. Eng.<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="FR-CA" style="mso-fareast-language:EN-CA">Quantum NanoFab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">N2L 3G1</span><span style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-CA">Cell: +1 226-929-1685</span><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.5pt;mso-fareast-language:EN-CA">Website:<span style="color:black">
<a href="https://fab.qnc.uwaterloo.ca/">https://fab.qnc.uwaterloo.ca/</a></span></span><span style="mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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