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<div style="direction: ltr;font-family: Tahoma;color: #000000;font-size: 10pt;">Dear Nava:
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<div>We sputter CoFeB all the time and have no issues to report other than your magnetron needs to be strong enough to sputter a magnetic materials.</div>
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<div>Best,</div>
<div>Su Gupta<br>
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<div id="divRpF503750" style="direction: ltr;"><font face="Tahoma" size="2" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu [labnetwork-bounces@mtl.mit.edu] on behalf of Nava Ariel-Sternberg [na2661@columbia.edu]<br>
<b>Sent:</b> Tuesday, March 28, 2017 7:36 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] CoFeB sputtering<br>
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<p class="MsoNormal">Good morning,</p>
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<p class="MsoNormal">Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.)</p>
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<p class="MsoNormal">Thanks,</p>
<p class="MsoNormal">Nava</p>
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<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.</p>
<p class="MsoNormal">Director of CNI Shared Facilities</p>
<p class="MsoNormal">Columbia University</p>
<p class="MsoNormal">530 w120th st., NY 10027</p>
<p class="MsoNormal">Room 1015/MC 8903</p>
<p class="MsoNormal">Office: 212-854-9927</p>
<p class="MsoNormal">Cell: 201-562-7600</p>
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