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<p class="MsoNormal">Hello Nava,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I talked to our PVD expert, Dr. Gerard Henein and he wrote:
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><i><span style="color:#0070C0">Yes we do have this target and several users have used it over the years.<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="color:#0070C0">No safety or contamination concern. It is a very strong ferromagnet so the target needs to be thin (ours is 1/8”) and you need very strong magnets in the sputter gun.<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="color:#0070C0">The material is also brittle and will develop a crack in the long run. Gradual power up and power down is best. Binding it to a copper backing plate will also help.<o:p></o:p></span></i></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Feel free to contact Gerard directly if you like. He is a wealth of knowledge.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Vince<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="http://www.cnst.nist.gov/"><span style="color:blue">Center for Nanoscale Science and Technology</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">+1-301-975-2886<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Tuesday, March 28, 2017 8:37 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] CoFeB sputtering<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Good morning,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have experience with sputtering CoFeB? Are there any issues to worry about? (tool contamination, process sensitivities, etc.)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Nava<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director of CNI Shared Facilities<o:p></o:p></p>
<p class="MsoNormal">Columbia University<o:p></o:p></p>
<p class="MsoNormal">530 w120th st., NY 10027<o:p></o:p></p>
<p class="MsoNormal">Room 1015/MC 8903<o:p></o:p></p>
<p class="MsoNormal">Office: 212-854-9927<o:p></o:p></p>
<p class="MsoNormal">Cell: 201-562-7600<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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