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I have a user that wants to replace there PDMS chamber with a PMMA
chamber for a microfluidic cell. They went and brought a low cost
resin press to try and hot emboss it with using either a 50-70 um
SU-8/Si master or a FR4 master (pattern etched into the Copper).
They tried a DRIE silicon master and broke it first press. So far
their PMMA print is distorted across the either 4" wafer due to
shrinkage. They are looking into alternative polymers, but yet to
find one. Does anyone have experience with this type to work?<br>
<br>
I am considering trying to etch into the PMMA using an RIE, but 50
um would be a long etch for our systems.<br>
<br>
Regards,<br>
<br>
Chito Kendrick<br>
<div class="moz-signature"><br>
-- <br>
<a href="https://sites.google.com/site/chitokendrickphd/">Chito
Kendrick Ph.D.</a><br>
<br>
Managing Director of the Microfabrication Facility<br>
Research Assistant Professor<br>
Electrical and Computer Engineering<br>
Michigan Technological University<br>
Room 436 M&M Building<br>
1400 Townsend Dr.<br>
Houghton, Michigan 49931-1295<br>
<br>
814-308-4255<br>
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