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<div class="moz-cite-prefix">Fouad,<br>
Appended are several control measures we use when there <br>
might be material concerns. Secondary coating is intriguing <br>
as a mechanism to trap materials on coated surfaces but I<br>
would doubt effective with respect to particulate issues.<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
Multiple pump/purge sequences before opening chamber to lab.<br>
Additional aluminum foil shielding which is removed, gently
folded, <br>
and placed in ziploc bags immediately after chamber opening.<br>
IPA and wipes and hepa vacuum of chamber internals when complete.<br>
Multiple reminders to never use N2 blow off guns with metal dep
systems.<br>
<br>
--------------------------------------<br>
<br>
<br>
<br>
Fouad Karouta wrote:<br>
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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Dear
network,</span><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We have an AJA sputter system with over 50
different targets. It is a multi-users facility and we do
change targets 2-3 times per week. To minimise possible
cross-contamination every target has its own mounting
accessories (housing, chimney, etc).<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">My question relate to possible toxic
by-products and we like to share this topic within this
network looking to hear your experience with same targets or
targets that may produce toxic/dust by-products.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">So recently we purchased Vanadium and
Vanadium oxide VO2 targets. Our user intends to use reactive
sputtering to produce different stoichiometry of the alloys.
We found that some forms of vanadium oxide are toxic like V2O4
and V2O5 (highly toxic and poisonous, especially the dust and
fumes). <o:p></o:p></p>
<p class="MsoNormal">So we like to share the following
questions/remarks and we appreciate your comments:<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:36.0pt;text-indent:-18.0pt;mso-list:l0
level1 lfo2">
<!--[if !supportLists]--><span style="mso-list:Ignore">1-<span
style="font:7.0pt "Times New Roman"">
</span></span><!--[endif]-->Does someone use targets that
may produce such toxic by-products, and how you handle this in
a multi-user facility?<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:36.0pt;text-indent:-18.0pt;mso-list:l0
level1 lfo2">
<!--[if !supportLists]--><span style="mso-list:Ignore">2-<span
style="font:7.0pt "Times New Roman"">
</span></span><!--[endif]-->Outside an adequate mask +
filters do you take any other precautions when opening chamber
to change targets?<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:36.0pt;text-indent:-18.0pt;mso-list:l0
level1 lfo2">
<!--[if !supportLists]--><span style="mso-list:Ignore">3-<span
style="font:7.0pt "Times New Roman"">
</span></span><!--[endif]-->After the use of such targets
with the potential risk of toxic particles would a sputtering
a thin layer of an Al or Cr layer would cover the toxic
particles and form a possible alternative to this issue?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you,<o:p></o:p></p>
<p class="MsoNormal">Fouad Karouta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">*************************************<o:p></o:p></p>
<p class="MsoNormal">Manager ANFF ACT Node<o:p></o:p></p>
<p class="MsoNormal">Australian National Fabrication Facility<o:p></o:p></p>
<p class="MsoNormal">Research School of Physics and Engineering<o:p></o:p></p>
<p class="MsoNormal">L. Huxley Building (#56), Mills Road, Room
4.02<o:p></o:p></p>
<p class="MsoNormal">Australian National University<o:p></o:p></p>
<p class="MsoNormal">ACT 0200, Canberra, Australia<o:p></o:p></p>
<p class="MsoNormal">Tel: + 61 2 6125 7174<o:p></o:p></p>
<p class="MsoNormal">Mob: + 61 451 046 412<o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Email: <a
href="mailto:fouad.karouta@anu.edu.au"
moz-do-not-send="true">
fouad.karouta@anu.edu.au</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a
href="http://anff-act.anu.edu.au/" moz-do-not-send="true">http://anff-act.anu.edu.au/</a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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