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<p class="MsoNormal"><span style="color:#1F497D">Greetings Network,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">At UC Riverside we have been fortunate to have a facility that was designed to be class 100 in one bay and 1,000 in the other and after 11 years of operation the particle counting still comes out well under the
designed spec. when measured anywhere around the working height. The floor is another story of course as that is where the particles that shed from the users end up. A well designed room is essential though. Since we are strictly a research lab working almost
exclusively with small fragments, should there be contamination on a sample it won’t cause thousands of dollars of damage as it could in a production environment. Yield is a non-issue here.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Obviously when doing Nanoscale research any particle in the micron region that lands on a sample could completely obscure the area of interest rendering that sample worthless. However that particle would have
to land on exactly the “wrong spot” in order to cause failure of the experiment so it becomes a matter of random fortune.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">So far, that has not been an issue so the protocols we are using are adequate for the work product we have. The largest wafers we use are 4 inch and even in that scale the contamination is extremely minimal.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We do use full length smocks, hair nets, shoe covers, gloves and face masks and try to enforce taking them off whenever leaving the clean area. As for smocks, we started out using Tyvek disposable smocks and
due to their excellent chemical resistance have never changed. We do re-use them but if they get torn or damaged they get tossed. This may be unusual but the results speak for themselves and the peace of mind having the students all in plastic bags is worth
it to me.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cheers,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Mark Heiden<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">UC Riverside<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="color:windowtext">From:</span></b><span style="color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Harold Gilles<br>
<b>Sent:</b> Thursday, May 18, 2017 5:56 AM<br>
<b>To:</b> Bill Flounders <bill@eecs.berkeley.edu>; Paolini, Steven <spaolini@cns.fas.harvard.edu>; Ferraguto, Thomas <Thomas_Ferraguto@uml.edu><br>
<b>Cc:</b> Fab Network (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] updated survey<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Good Morning Folks,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I started work at Intel as a process engineer in 1976. In those days we did not have bunny suits, we wore smocks and hair cover and gloves when needed. I retired from Intel in 2010.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We made lots of changes in this area based on need over the years. Changes were justified by data. Defects are expensive and don’t help you make devices. There are different levels of protocol that can be applied
and your lab will need to decide based on what they are making. You should also consider what you may be doing in the future. Getting folks on board with the proper level of discipline is difficult, maintaining the culture is difficult and trying to change
to the next level can be an endless task. In a university setting it is even more difficult to make the changes and those that need to benefit from the change will likely be gone before they can benefit. I would always error on the side of better control
in this topic. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hal Gilles <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif;color:windowtext">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Bill Flounders<br>
<b>Sent:</b> Wednesday, May 17, 2017 7:30 PM<br>
<b>To:</b> Paolini, Steven; Ferraguto, Thomas<br>
<b>Cc:</b> Fab Network (<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>)<br>
<b>Subject:</b> Re: [labnetwork] updated survey<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Steve,<br>
Have I seen a study - no.<br>
Am I an advocate of modest gowning - yes.<br>
Am I an advocate of no gowning - no<br>
Modest gowning = frock coat, booties and bouffant cap. (and gloves)<br>
This is easy to don and remove for staff that are primarily in the chases.<br>
We switched to full bunny suit instead of frock coat for researchers and<br>
process staff who are mainly in the bays.<br>
I like the additional layer of chemical protection provided to the legs.<br>
Full bunny suit emphasizes you are in a clean room and provides some<br>
level of training on protocol and attention to your environment.<br>
Disposable suits with a single zipper are quick to don and remove.<br>
<br>
I don't see either of our protocols as significant impact on productivity.<br>
I have been to many labs that have complex and expensive protocol<br>
that I consider of questionable value.<br>
<br>
Good Luck with the national debate.<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
<br>
<br>
Paolini, Steven wrote:<o:p></o:p></p>
</div>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal"><span style="color:#1F497D">Not to start a national debate but has anybody ever seen a comprehensive study of the benefits of full gowning versus the expense and trouble? As a former Field service engineer and long time fab rat, I have
visited many sites and no two follow the same protocol. The interesting part of this is that every site believes that theirs is the best. How can something that’s fairly scientific be so subjective? I do notice that all of these sites are of the “wrap em’
up” method, but my perennial question is “at what expense?” Is the ten minutes lost to dash out of the clean room to retrieve an item worth whatever benefit full gowning provides? Has anyone ever estimated if the loss of working time because of the added
activity is worth the effort? I am a firm believer in that higher air changes per hour is the best contributor to a clean room’s performance. I do doubt however, that the obstacle of full gowning in a clean room class 100 or dirtier offers little, if any,
contribution to the overall room performance. </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">After donning bunny suits for more than 35 years, I have yet to find a
<i>comprehensive </i>study on this subject. I have seen many a paper written that emphasizes high particle counts on personnel that aren’t fully gowned but that’s half of the equation, If loss of productivity and general work habit change is factored in, does
it become a “non value add” activity? Wouldn’t it be nice if you could just wear booties, a hairnet, and lab coat without any detrimental effects to your space?</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">I think the microelectronic and nanofabrication community has been influenced by the larger fabs in that whatever they do must be the right thing. It’s been many years since we have been gowning up to enter a
clean space but maybe it’s time to determine if the trouble and expense equate to the benefit. Other industries that are under constant expense pressure have altered their methods to lower costs. The food packaging business for example has moved from providing
a clean general space to mini environments in which critical process steps are done in a high HEPA flow area directed at the product.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> Is there anyone in this network that questions this practice and has access to a good scientific study that might help settle this (my) dispute? Is there anyone here that can support my claim of full gowning
to be high cost/low benefit ?</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Thanks for listening.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<div>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Steve Paolini</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Principal Equipment Engineer</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Harvard University Center for Nanoscale Systems</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">11 Oxford St.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Cambridge, MA 02138</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">617- 496- 9816</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a></span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a></span><o:p></o:p></p>
</div>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Ferraguto, Thomas<br>
<b>Sent:</b> Wednesday, May 17, 2017 12:45 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] updated survey</span><o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Here’s the updated flash survey for ERP Systems and Interlocks.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">On a side note, I did a video audit of our “Honor System” run lab and we did not book 31% of the Activity.
<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="815" style="width:611.0pt;margin-left:-.4pt;border-collapse:collapse">
<tbody>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>Institution</b><o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border:solid windowtext 1.0pt;border-left:none;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>System</b><o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border:solid windowtext 1.0pt;border-left:none;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>FTE's</b><o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border:solid windowtext 1.0pt;border-left:none;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>Interlocks</b><o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>Total</b><o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>52% Home Grown</b><o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right"><b>0.60</b><o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;background:yellow;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right"><b>83.3%</b><o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">UC Davis<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Badger<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.25<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Houston<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.0025<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Stanford<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Badger<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Utah<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Freiburg<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/w Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">MIT<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Delft University<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Phoenix <o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Delaware<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">UNC<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">UC San Diego<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.25<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">UMass Lowell<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Purdue<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Ilab<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">EPFL-Lausanne-Switzerland:<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Cal-Tech<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/Labrunr<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.3<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Texas<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Harvard<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Berkeley<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.75<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">UCSB<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/SignupMonkey<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.125<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Washington Nanofabrication Facility (WNF) <o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/w Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Georgia Tech<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown SUMS <o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Columbia University<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Badger<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Alberta<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown LMACS<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.5<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Florida<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.5<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0in 5.4pt 0in 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Best Regards<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Tom <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">Saab ETIC Nanofabrication Laboratory Director<o:p></o:p></p>
<p class="MsoNormal">Saab ETIC Building Director<o:p></o:p></p>
<p class="MsoNormal">1 University Avenue<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854<o:p></o:p></p>
<p class="MsoNormal">Mobile 617-755-0910<o:p></o:p></p>
<p class="MsoNormal">Land 978-934-1809<o:p></o:p></p>
<p class="MsoNormal">Fax 978-934-1014 <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><br>
<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
</blockquote>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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