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<div class="WordSection1">
<p class="MsoNormal">Hello Steve,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I’ll add my voice to the chorus. I’ve worked in labs that have ramped down their garment protocols only to discover they need to ramp them back up. It was easy to get people to loosen up much harder to get folks to welcome the more stricter
protocols. I have also been involved in yield enhancement projects for volume IC production where are analysis of particle sources was very enlightening and convinced me of the benefits of keeping things clean.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I recall in the early days of silicon-on-insulator in our rather casually enforced research cleanrooms, many of us were bonding our own wafers together…the stray particle was enough to ruin our day. We had to tighten up our lab even more.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Vince<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Vincent K. Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">NanoFab Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif"><a href="http://www.cnst.nist.gov/"><span style="color:blue">Center for Nanoscale Science and Technology</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">National Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">100 Bureau Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">Gaithersburg, MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Microsoft Sans Serif",sans-serif">+1-301-975-2886<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Trebuchet MS",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Paolini, Steven<br>
<b>Sent:</b> Wednesday, May 17, 2017 3:09 PM<br>
<b>To:</b> Ferraguto, Thomas <Thomas_Ferraguto@uml.edu><br>
<b>Cc:</b> Fab Network (labnetwork@mtl.mit.edu) <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] updated survey<o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Not to start a national debate but has anybody ever seen a comprehensive study of the benefits of full gowning versus the expense and trouble? As a former Field service engineer and long time fab rat, I have
visited many sites and no two follow the same protocol. The interesting part of this is that every site believes that theirs is the best. How can something that’s fairly scientific be so subjective? I do notice that all of these sites are of the “wrap em’
up” method, but my perennial question is “at what expense?” Is the ten minutes lost to dash out of the clean room to retrieve an item worth whatever benefit full gowning provides? Has anyone ever estimated if the loss of working time because of the added
activity is worth the effort? I am a firm believer in that higher air changes per hour is the best contributor to a clean room’s performance. I do doubt however, that the obstacle of full gowning in a clean room class 100 or dirtier offers little, if any,
contribution to the overall room performance. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">After donning bunny suits for more than 35 years, I have yet to find a
<i>comprehensive </i>study on this subject. I have seen many a paper written that emphasizes high particle counts on personnel that aren’t fully gowned but that’s half of the equation, If loss of productivity and general work habit change is factored in, does
it become a “non value add” activity? Wouldn’t it be nice if you could just wear booties, a hairnet, and lab coat without any detrimental effects to your space?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I think the microelectronic and nanofabrication community has been influenced by the larger fabs in that whatever they do must be the right thing. It’s been many years since we have been gowning up to enter a
clean space but maybe it’s time to determine if the trouble and expense equate to the benefit. Other industries that are under constant expense pressure have altered their methods to lower costs. The food packaging business for example has moved from providing
a clean general space to mini environments in which critical process steps are done in a high HEPA flow area directed at the product.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"> Is there anyone in this network that questions this practice and has access to a good scientific study that might help settle this (my) dispute? Is there anyone here that can support my claim of full gowning
to be high cost/low benefit ?<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Thanks for listening.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="mailto:spaolini@cns.fas.harvard.edu">spaolini@cns.fas.harvard.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;color:#1F497D"><a href="http://www.cns.fas.harvard.edu">www.cns.fas.harvard.edu</a><o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Ferraguto, Thomas<br>
<b>Sent:</b> Wednesday, May 17, 2017 12:45 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] updated survey<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Here’s the updated flash survey for ERP Systems and Interlocks.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">On a side note, I did a video audit of our “Honor System” run lab and we did not book 31% of the Activity.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" width="815" style="width:611.0pt;margin-left:-.4pt;border-collapse:collapse">
<tbody>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>Institution<o:p></o:p></b></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border:solid windowtext 1.0pt;border-left:none;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>System<o:p></o:p></b></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border:solid windowtext 1.0pt;border-left:none;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>FTE's<o:p></o:p></b></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border:solid windowtext 1.0pt;border-left:none;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal"><b>Interlocks<o:p></o:p></b></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal"><b><span style="color:black">Total<o:p></o:p></span></b></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal"><b><span style="color:black">52% Home Grown<o:p></o:p></span></b></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right"><b><span style="color:black">0.60<o:p></o:p></span></b></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;background:yellow;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right"><b><span style="color:black">83.3%<o:p></o:p></span></b></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">UC Davis<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Badger<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.25<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Houston<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.0025<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Stanford<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Badger<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Utah<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Freiburg<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/w Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">MIT<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Delft University<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Phoenix <o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Delaware<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">UNC<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">UC San Diego<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.25<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">UMass Lowell<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">FOM<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Purdue<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Ilab<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">EPFL-Lausanne-Switzerland:<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Cal-Tech<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/Labrunr<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.3<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Texas<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Harvard<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Berkeley<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.75<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">UCSB<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/SignupMonkey<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.125<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">No<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Washington Nanofabrication Facility (WNF) <o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown/w Coral<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">1<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Georgia Tech<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown SUMS <o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">2<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Columbia University<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Badger<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Alberta<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown LMACS<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.5<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
<tr style="height:15.0pt">
<td width="375" nowrap="" valign="bottom" style="width:281.0pt;border:solid windowtext 1.0pt;border-top:none;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">University of Florida<o:p></o:p></p>
</td>
<td width="191" nowrap="" valign="bottom" style="width:143.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Home Grown<o:p></o:p></p>
</td>
<td width="103" nowrap="" valign="bottom" style="width:77.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal" align="right" style="text-align:right">0.5<o:p></o:p></p>
</td>
<td width="147" nowrap="" valign="bottom" style="width:110.0pt;border-top:none;border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;padding:0cm 5.4pt 0cm 5.4pt;height:15.0pt">
<p class="MsoNormal">Yes<o:p></o:p></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best Regards<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Tom <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">Saab ETIC Nanofabrication Laboratory Director<o:p></o:p></p>
<p class="MsoNormal">Saab ETIC Building Director<o:p></o:p></p>
<p class="MsoNormal">1 University Avenue<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854<o:p></o:p></p>
<p class="MsoNormal">Mobile 617-755-0910<o:p></o:p></p>
<p class="MsoNormal">Land 978-934-1809<o:p></o:p></p>
<p class="MsoNormal">Fax 978-934-1014 <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
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