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<p class="MsoNormal"><span style="color:#1F497D">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We have had excellent success with a KDF sputter tool, 4 targets with RF sputter module. It is modeled on the former MRC tools, industry work horse.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard H. Morrison<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Draper<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Jingqi Li<br>
<b>Sent:</b> Tuesday, June 13, 2017 9:30 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Please recommend a RF sputter system<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear All,<o:p></o:p></p>
<p class="MsoNormal">We want to order a RF sputter system with at least 4 target sources. Could you please recommend one company to me according to your experience? The system should have less cross contamination and reliable mechanical operation (for example,
sample transportation between chamber and load lock, our current system has a lot of problem with this).
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks & Regards<o:p></o:p></p>
<p class="MsoNormal">Jingqi Li<o:p></o:p></p>
<p class="MsoNormal">Nanofabrication Core Lab<o:p></o:p></p>
<p class="MsoNormal">King Abdullah University of Science and Technology<o:p></o:p></p>
<p class="MsoNormal">Thuwal 23955-6900<o:p></o:p></p>
<p class="MsoNormal">Saudi Arabia<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Tel: +966 012 808 4589<o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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