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<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Dear Jingqi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Since > 10 years we do use an AJA sputter system with 6 guns: 3 RF and 3 DC. The system is running well and we had minor issues that were solved remotely with advice from supplier.
They have smaller chambers to fit 4 guns.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Kind regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-US">Fouad Karouta<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">*************************************<o:p></o:p></p>
<p class="MsoNormal">Manager ANFF ACT Node<o:p></o:p></p>
<p class="MsoNormal">Australian National Fabrication Facility<o:p></o:p></p>
<p class="MsoNormal">Research School of Physics and Engineering<o:p></o:p></p>
<p class="MsoNormal">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></p>
<p class="MsoNormal">Australian National University<o:p></o:p></p>
<p class="MsoNormal">ACT 0200, Canberra, Australia<o:p></o:p></p>
<p class="MsoNormal">Tel: + 61 2 6125 7174<o:p></o:p></p>
<p class="MsoNormal">Mob: + 61 451 046 412<o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Email: <a href="mailto:fouad.karouta@anu.edu.au">
<span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://anff-act.anu.edu.au/"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Jingqi Li<br>
<b>Sent:</b> Tuesday, 13 June 2017 11:30 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Please recommend a RF sputter system<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">Dear All,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">We want to order a RF sputter system with at least 4 target sources. Could you please recommend one company to me according to your experience? The system should have less cross contamination and reliable mechanical operation
(for example, sample transportation between chamber and load lock, our current system has a lot of problem with this).
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thanks & Regards<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Jingqi Li<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Nanofabrication Core Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">King Abdullah University of Science and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thuwal 23955-6900<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Saudi Arabia<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Tel: +966 012 808 4589<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p> </o:p></span></p>
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this message in error, please notify me immediately and delete this message from your computer system. Any unauthorized use or distribution is prohibited. Please consider the environment before printing this email.</span><span lang="EN-US" style="font-size:12.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
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