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<p>I have a user that is wanting to sputter Erbium. From a quick
search Erbium is pretty reactive with air and both our sputters
are not load locked and so the target would be coming up to
atmosphere when un/loading. Has anyone had experience with
sputtering of Erbium and if there will be issues? I have not
talked to the user about what they want to do exactly, but it
sounds like they want to produce Er nanoparticles in a silicon
thin film.</p>
<p>Regards,</p>
<p>Chito Kendrick<br>
</p>
<br>
<div class="moz-signature">-- <br>
<a href="https://sites.google.com/site/chitokendrickphd/">Chito
Kendrick Ph.D.</a><br>
<br>
Managing Director of the Microfabrication Facility<br>
Research Assistant Professor<br>
Electrical and Computer Engineering<br>
Michigan Technological University<br>
Room 436 M&M Building<br>
1400 Townsend Dr.<br>
Houghton, Michigan 49931-1295<br>
<br>
814-308-4255<br>
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