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<div class="moz-cite-prefix">The Berkeley NanoLab has been using
Allwin21<br>
RTA tools for many years to anneal PZT solgel films.<br>
<br>
To address cross contamination concerns we have a<br>
dedicated chamber and 'paddle' for PZT processing.<br>
We have additional chambers for other select materials<br>
for the same cross contamination control strategy.<br>
Members request to process special materials and <br>
staff schedule chamber swap and post current tool status.<br>
<br>
Allwin21 has provided excellent support of our RTA tools.<br>
They may offer you spare chambers or may direct you to a 3rd<br>
party supplier. We use LP Glass<br>
<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
<br>
<br>
<br>
On 6/28/2017 6:14 PM, Fred Newman wrote:<br>
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cite="mid:CAHwjARP9K9e6Kj8YH7uON--8A-SbxEwsmuqGjPL2WstN4C4wJg@mail.gmail.com">
<div dir="ltr">Dear Colleagues,
<div><br>
</div>
<div>One of our users has expressed an interest in annealing sol
gel PZT around 700C in an Allwin21 AW610 RTA tool. Has anyone
had experience with this process who could comment on setting
up scavenging or abatement of Pb-containing volatile
components from the process gas exhaust, or could recommend
measures to avoid Pb contamination of the tool? Any advice or
suggestions would be most appreciated.</div>
<div><br>
</div>
<div>Many thanks</div>
<div>Fred</div>
<div><br clear="all">
<div><br>
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-- <br>
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<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px">Fred
Newman</div>
<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px">Research
Engineer</div>
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<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;word-wrap:break-word">Washington
Nanofabrication
Facility (WNF)<br>
University of
Washington</div>
<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;word-wrap:break-word">Fluke
Hall 115, Box 352143</div>
<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;word-wrap:break-word">office
206-616-3534</div>
<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;word-wrap:break-word">mobile
505-450-4447</div>
<div
style="color:rgb(0,0,0);font-family:Helvetica;font-size:12px;word-wrap:break-word"><a
href="mailto:fnewman@uw.edu" target="_blank" moz-do-not-send="true">fnewman@uw.edu</a></div>
<div
style="word-wrap:break-word"><font
face="Helvetica"
color="#000000"><span
style="font-size:12px"><a href="https://www.wnf.washington.edu/"
target="_blank"
moz-do-not-send="true">https://www.wnf.washington.edu/</a></span></font><br>
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