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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">Frank:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">LED’s do emit in the UV … see spectral response below … thus they need filters …<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">These are for 4000K and 5000K LED’s.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">The lower the temperature the broader the spectral output in the visible range and the lower the peak output is in the 400 to 450 nm range. There is also a shift to the visible
for the lower temperatures towards higher wavelengths (toward 500 nM).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">D<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">4000K<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><img width="563" height="362" id="Picture_x0020_4" src="cid:image003.png@01D2F743.6407FBC0" alt="Inline image 1"></span><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D">5000K<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><img width="563" height="388" id="_x0000_i1025" src="cid:image004.png@01D2F743.6407FBC0" alt="Inline image 2"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><b><span style="font-family:"Arial",sans-serif">Dennis S Grimard</span></b><span style="font-family:"Arial",sans-serif">, Ph.D</span><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Associate Director of Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-family:"Arial",sans-serif;color:red">MIT.nano<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-family:"Arial",sans-serif">School of Engineering<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-family:"Arial",sans-serif;color:red">Massachusetts Institute of Technology<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">60 Vassar Street, Bldg 39-559<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Cambridge, MA 02139<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">C: (734) 368-7172<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">EM: dgrimard@mit.edu<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="color:windowtext">From:</span></b><span style="color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Friday, July 07, 2017 3:07 PM<br>
<b>To:</b> 'Frank Gavin' <fgavin@wafabintl.com>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] LED lights in photosensitive areas - yellow lens needed?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span style="color:#1F497D">Hi Frank,
</span></a><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We have installed LED lights in our litho area and heard the same claim but we checked with photoresist manufacturers and their recommendation was to have amber filers and block all wavelength below 500nm.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Although LED lights do not emit in the UV, some of the photoresists are sensitive to the lower part of the visible range.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We ended up purchasing amber plastic filters and installed them on top of the LED lights.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hope this helps,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Nava<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="color:#1F497D">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Director of CNI Shared Facilities<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Columbia University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">530 w120th st., NY 10027<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Room 1015/MC 8903<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Office: 212-854-9927<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cell: 201-562-7600<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Tahoma",sans-serif;color:#1F497D"></span><span style="font-size:12.0pt;font-family:"Times New Roman",serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="color:windowtext">From:</span></b><span style="color:windowtext">
</span><a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a><span style="color:windowtext"> [</span><a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a><span style="color:windowtext">]
<b>On Behalf Of </b>Frank Gavin<br>
<b>Sent:</b> Friday, July 7, 2017 12:58 PM<br>
<b>To:</b> </span><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><span style="color:windowtext"><br>
<b>Subject:</b> [labnetwork] LED lights in photosensitive areas - yellow lens needed?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hello everyone<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">We are suppliers of wet process equipment and one of our vendors of HEPA and ULPA fan/filter units tells us that we do not need to add yellow lens covers over LED light because such lights do not emit ultraviolet light. I am always suspicious
of simple convenient solutions so I want to put this statement out to this learned community and learn if this statement is true. Perhaps some members have experience using LED lights in photosensitive areas of their fab and would care to comment?<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="color:windowtext"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">FRANK GAVIN, Sales Eng.<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://www.wafabintl.com/"><span style="color:windowtext;text-decoration:none"><img border="0" width="200" height="61" id="Picture_x0020_3" src="cid:image001.png@01D2F743.19803DB0" alt="Description: WaFab_Logo200px"></span></a><span style="color:windowtext"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:#092F87">6161 Industrial Way, Livermore CA 94551<br>
<b>(925) 455-5252 ext 2420</b> Fax: (925) 455-5351</span><span style="font-size:10.0pt"><br>
</span><a href="http://www.wafabintl.com/"><span style="font-size:10.0pt">http://www.wafabintl.com</span></a><span style="font-size:10.0pt;color:windowtext"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:#1F497D">direct dial: 925-800-5551<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;color:#1F497D">cell (408) 314-6199<o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#1F497D"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#1F497D">Please visit us at:<o:p></o:p></span></b></p>
<p class="MsoNormal"><a href="http://www.semi.org/en/semicon-west-2017"><span style="color:#1F497D;text-decoration:none"><img border="0" width="177" height="29" id="Picture_x0020_1" src="cid:image002.png@01D2F743.19803DB0" alt="Description: Description: Description: \\WAFAB-DC\Folder Redirection\fgavin\Desktop\semi17-hdpi-logo.png"></span></a><span style="color:windowtext"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#1F497D"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#1F497D">July 11<sup>th</sup> –13<sup>th</sup>
<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;color:#1F497D">Moscone Center, San Francisco
</span></b><b><span style="font-size:10.0pt;color:#37373C;background:white">Booth: 7817 (West Hall)<o:p></o:p></span></b></p>
<p class="MsoNormal"><span style="color:windowtext"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:windowtext"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:windowtext"><o:p> </o:p></span></p>
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