<div dir="ltr"><div><div>Use the C4F8 step only of your pulsed gas (Bosch Process) etcher<br></div>Bill Flounders<br></div>UC Berkeley<br><br><br></div><div class="gmail_extra"><br><div class="gmail_quote">On Wed, Aug 9, 2017 at 4:52 PM, Fouad Karouta <span dir="ltr"><<a href="mailto:fouad.karouta@anu.edu.au" target="_blank">fouad.karouta@anu.edu.au</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">





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<p class="MsoNormal">Hi all,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">We have a suer looking to sputter teflon (PTFE), I wonder if there is any facility in the network capable of sputtering PTFE.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Thanks, Fouad<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><span>******************************<wbr>*******<u></u><u></u></span></p>
<p class="MsoNormal"><span>Manager ANFF ACT Node<u></u><u></u></span></p>
<p class="MsoNormal"><span>Australian National Fabrication Facility<u></u><u></u></span></p>
<p class="MsoNormal"><span>Research School of Physics and Engineering<u></u><u></u></span></p>
<p class="MsoNormal"><span>L. Huxley Building (#56), Mills Road, Room 4.02<u></u><u></u></span></p>
<p class="MsoNormal"><span>Australian National University<u></u><u></u></span></p>
<p class="MsoNormal"><span>ACT 0200, Canberra, Australia<u></u><u></u></span></p>
<p class="MsoNormal"><span>Tel: <a href="tel:+61%202%206125%207174" value="+61261257174" target="_blank">+ 61 2 6125 7174</a><u></u><u></u></span></p>
<p class="MsoNormal"><span>Mob: <a href="tel:+61%20451%20046%20412" value="+61451046412" target="_blank">+ 61 451 046 412</a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d">Email:
<a href="mailto:fouad.karouta@anu.edu.au" target="_blank"><span style="color:blue">fouad.karouta@anu.edu.au</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><span style="color:#1f497d"><a href="http://anff-act.anu.edu.au/" target="_blank"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><u></u><u></u></span></p>
<p class="MsoNormal"><u></u> <u></u></p>
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