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Hello Rick,<br>
<br>
We avoid zinc and its alloys (brass etc) in all of our deposition
systems. This is to do with its high vapor pressure, especially when
heated, and tendency to poison a vacuum system, keeping you from
achieving historically good base pressures. I'd refer you to this
site for a scratch-the-surface explanation: <br>
<a class="moz-txt-link-freetext" href="http://www.mtm-inc.com/ac-20120328-vacuum-compatible-metals-and-alloys.html">http://www.mtm-inc.com/ac-20120328-vacuum-compatible-metals-and-alloys.html</a><br>
<br>
You might be able to approach it if you had a high confidence method
of switching to zinc-mode and capturing all the sputtered or
evaporated material. Lots of shielding, foil, and minimized time in
the chamber. A dedicated "dirty" system would be preferable. <br>
<br>
We're open to zinc oxide, though no one has tried it. In this case I
would start from a zinc oxide target and add a little oxygen to keep
it in oxide form, rather than trying to reactively sputter from a
zinc target. <br>
<br>
Regards,<br>
<br>
Carsen<br>
<br>
<div class="moz-cite-prefix">On 8/14/2017 8:16 AM, Morrison, Richard
H., Jr wrote:<br>
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<p class="MsoNormal">HI Everyone,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anybody have any experience with
evaporation or sputter of Zinc? Any concerns out there?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks<o:p></o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard H. Morrison<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Draper<o:p></o:p></p>
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<pre class="moz-signature" cols="72">--
Carsen Kline
Lab Operations Manager
Stanford Nanofabrication Facility
Paul G. Allen Bldg 131
Stanford, CA 94305
(650)724-8214
<a class="moz-txt-link-abbreviated" href="mailto:carsen@stanford.edu">carsen@stanford.edu</a>
<a class="moz-txt-link-freetext" href="http://snf.stanford.edu">http://snf.stanford.edu</a></pre>
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