<html xmlns="http://www.w3.org/1999/xhtml" xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office"><head><!--[if gte mso 9]><xml><o:OfficeDocumentSettings><o:AllowPNG/><o:PixelsPerInch>96</o:PixelsPerInch></o:OfficeDocumentSettings></xml><![endif]--></head><body>
After 35 some years working with Photomask , I recommend a cleaning system be high pressure jets or the chemical ones , but NOT the use of any brushes, they damage more than they help.. soft cleaning tissues n cleaning solutions by hand works just well. <br><br><br><a href="https://yho.com/footer0">Sent from Yahoo Mail for iPhone</a><br><div>Mario Portillo, hbtusainc@yahoo.com</div><br><p class="yahoo-quoted-begin" style="font-size: 15px; color: #715FFA; padding-top: 15px; margin-top: 0">On Wednesday, August 16, 2017, 4:54 AM, Morrison, Richard H., Jr <rmorrison@draper.com> wrote:</p><blockquote class="iosymail"><div id="yiv5869762293">
<style><!--
#yiv5869762293
_filtered #yiv5869762293 {font-family:"Cambria Math";panose-1:2 4 5 3 5 4 6 3 2 4;}
_filtered #yiv5869762293 {font-family:Calibri;panose-1:2 15 5 2 2 2 4 3 2 4;}
#yiv5869762293
#yiv5869762293 p.yiv5869762293MsoNormal, #yiv5869762293 li.yiv5869762293MsoNormal, #yiv5869762293 div.yiv5869762293MsoNormal
{margin:0in;margin-bottom:.0001pt;font-size:11.0pt;font-family:"Calibri", sans-serif;}
#yiv5869762293 h6
{margin-right:0in;margin-left:0in;font-size:7.5pt;font-family:"Times New Roman", serif;font-weight:bold;}
#yiv5869762293 a:link, #yiv5869762293 span.yiv5869762293MsoHyperlink
{color:#0563C1;text-decoration:underline;}
#yiv5869762293 a:visited, #yiv5869762293 span.yiv5869762293MsoHyperlinkFollowed
{color:#954F72;text-decoration:underline;}
#yiv5869762293 p
{margin-right:0in;margin-left:0in;font-size:12.0pt;font-family:"Times New Roman", serif;}
#yiv5869762293 span.yiv5869762293Heading6Char
{font-family:"Calibri Light", sans-serif;color:#1F4D78;}
#yiv5869762293 span.yiv5869762293EmailStyle19
{font-family:"Calibri", sans-serif;color:windowtext;}
#yiv5869762293 span.yiv5869762293EmailStyle20
{font-family:"Calibri", sans-serif;color:#1F497D;}
#yiv5869762293 span.yiv5869762293EmailStyle21
{font-family:"Calibri", sans-serif;color:windowtext;}
#yiv5869762293 .yiv5869762293MsoChpDefault
{font-size:10.0pt;}
_filtered #yiv5869762293 {margin:1.0in 1.0in 1.0in 1.0in;}
#yiv5869762293 div.yiv5869762293WordSection1
{}
--></style>
<div>
<div class="yiv5869762293WordSection1">
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">Hi,</span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">We use a modified mask cleaner sold by Ultra-T (California company). It uses a high pressure water jet that scans across a moving wafer it knocks of debris. We alos have a single wafer/mask cleaner that uses
RCA type chemicals and brushes to clean photo mask. I bet a snow clean (air blast with CO2 ice) might work, you get purchases automated snow clean tools.</span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">Ultra T web site is <a rel="nofollow" target="_blank" href="http://www.ultrat.com/index.html">
http://www.ultrat.com/index.html</a></span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">Mask cleaner is sold by Hamatech now owned by Suss Microtech</span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">Snow cleaners <a rel="nofollow" target="_blank" href="http://www.cryosnow.com/index.php/en/Products/">
http://www.cryosnow.com/index.php/en/Products/</a></span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">Rick</span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<p class="yiv5869762293MsoNormal"> </p>
<p class="yiv5869762293MsoNormal">Richard H. Morrison</p>
<p class="yiv5869762293MsoNormal">Principal Member of the Technical Staff</p>
<p class="yiv5869762293MsoNormal">Draper</p>
<p class="yiv5869762293MsoNormal">555 Technology Square</p>
<p class="yiv5869762293MsoNormal">Cambridge, MA</p>
<p class="yiv5869762293MsoNormal">02139-3573</p>
<p class="yiv5869762293MsoNormal"> </p>
<p class="yiv5869762293MsoNormal">Work <a dir="ltr" href="tel:617-258-3420" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="5">617-258-3420</a></p>
<p class="yiv5869762293MsoNormal">Cell <a dir="ltr" href="tel:508-930-3461" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="6">508-930-3461</a></p>
<p class="yiv5869762293MsoNormal"><a rel="nofollow" target="_blank" href="http://www.draper.com"><span style="color:#0563C1;">www.draper.com</span></a></p>
<p class="yiv5869762293MsoNormal"> </p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;"> </span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in;">
<p class="yiv5869762293MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Gavin, Frank<br>
<b>Sent:</b> Tuesday, August 15, 2017 5:11 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Looking for cleaning advice - post wire-saw - removing slurry from wafers</p>
</div>
</div>
<p class="yiv5869762293MsoNormal"> </p>
<p class="yiv5869762293MsoNormal">I am looking for a process to clean post wire sawing Silicon Carbide substrates. The material being cleaning is SiC substrates and the abrasive that needs to be removed is a synthetic glycol based fluid mixed with diamond powder. During
the wire sawing process there is also kerf from the SiC as well as the steel cord wire that abrades as well. It is a very aggressive process and heavy solids need to be removed. Operators are spending the day hand wiping wafers. Any advice is welcomed.</p>
<p class="yiv5869762293MsoNormal"> </p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">Best Regards,</span></p>
<p class="yiv5869762293MsoNormal"><span style="color:#1F497D;">FRANK GAVIN, Sales Eng.</span></p>
<p class="yiv5869762293MsoNormal"><a rel="nofollow" target="_blank" href="http://www.wafabintl.com/"><span style="color:windowtext;text-decoration:none;"><img border="0" width="200" height="61" id="yiv5869762293Picture_x0020_1" src="cid:KfDch1AkNTcxjxSJ9dqn" alt="WaFab_Logo200px"></span></a></p>
<p class="yiv5869762293MsoNormal" style="margin-bottom:12.0pt;"><span style="font-size:10.0pt;color:#092F87;">6161 Industrial Way, Livermore CA 94551<br>
<b><a dir="ltr" href="tel:(925)%20455-5252;2420" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="12">(925) 455-5252 ext 2420</a></b> Fax: <a dir="ltr" href="tel:(925)%20455-5351" x-apple-data-detectors="true" x-apple-data-detectors-type="telephone" x-apple-data-detectors-result="13">(925) 455-5351</a></span></p>
<p class="yiv5869762293MsoNormal"> </p>
<p class="yiv5869762293MsoNormal"><span style="font-size:10.0pt;color:blue;"><br>
<br>
Beyond Zero – The <b>KINETICS</b> Culture of Safety </span></p>
<h6><span style="color:gray;">This e-mail and any files transmitted with it are confidential and intended solely for the use of the individual or entity to whom they are addressed. Please notify the sender immediately by e-mail
if you have received this e-mail by mistake and delete this e-mail from your system. Any views or opinions presented in this e-mail are solely those of the author and do not necessarily represent those of Kinetic Systems, Inc. Kinetic Systems, Inc. accepts
no liability for any damage caused by any virus transmitted by this e-mail.
</span></h6>
</div>
<hr>
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately
destroy all copies of this email.
<hr>
</div>
</div>_______________________________________________<br>labnetwork mailing list<br><a ymailto="mailto:labnetwork@mtl.mit.edu" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br><blockquote></blockquote></blockquote>
</body></html>