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<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Hi Esta,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">We buy our 4”, 5”, 6”, and 7” plates from Nanofilm (all borosilicate), but I believe they have soda lime, too (and maybe quartz). We buy them pre-coated with AZ1518.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">We don’t do anything special for storage other than keep them in the boxes (which are opaque) under the yellow lights in the cleanroom. The resist is fairly stable as far as I can tell –
even after months and months on the shelf they perform consistently for us.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Norman Gottron<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Process Engineer, Carnegie Mellon University Nanofabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Electrical and Computer Engineering | Carnegie Mellon University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">5000 Forbes Ave<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Pittsburgh, PA 15213<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Phone: 412-268-4205<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif"">Fax: 412-268-3497<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><a href="http://www.ece.cmu.edu/"><span style="color:#0563C1">www.ece.cmu.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif";color:#1F497D"><a href="http://www.nanofab.ece.cmu.edu/"><span style="color:#0563C1">www.nanofab.ece.cmu.edu</span></a></span><span style="font-family:"Verdana","sans-serif""><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Verdana","sans-serif""><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Abelev, Esta<br>
<b>Sent:</b> Friday, August 18, 2017 9:17 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Quartz plates for mask making<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Our facility getting it first Heidelberg laser write tool. I would like to get advice where to buy quartz or Soda lime plates with Cr (maybe even with resist) to make masks.<o:p></o:p></p>
<p class="MsoNormal">In addition, if some can comment how to store them in the cleanroom.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thank you, Esta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:Atlanta">-----------------------</span><o:p></o:p></p>
<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:Atlanta">Esta Abelev, PhD</span></b><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:Atlanta">Technical Director,<i> </i>Petersen Institute of NanoScience and Engineering </span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:Atlanta">University of Pittsburgh | 3700 O’Hara Street | 636| Pittsburgh, PA 15261</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:Atlanta">412-383-4096 | <a href="mailto:eabelev@pitt.edu"><span style="color:#0066CC;text-decoration:none">eabelev@pitt.edu</span></a> | <a href="https://na01.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.nano.pitt.edu%2F&data=01%7C01%7Ceabelev%40pitt.edu%7C9f5bd58ba84940765cf308d4024fbe18%7C9ef9f489e0a04eeb87cc3a526112fd0d%7C1&sdata=3KfbG5VbshqdoIAPxvX%2F2s1UeU7ultmBoZmm%2FaZ2Itc%3D&reserved=0"><span style="color:purple;text-decoration:none">nano.pitt.edu</span></a></span><o:p></o:p></p>
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