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<div class="moz-cite-prefix">We commonly use a 10 nm gold film,
sputtered on top of ZEP or PMMA. The film can be removed with KI/I
solution (Transene TFA etchant) before development. <br>
<br>
The University of Minnesota has a nice web page about conducting
layers for ebeam:
<a class="moz-txt-link-freetext" href="http://apps.mnc.umn.edu/archive/ebpgwiki/Charging.html">http://apps.mnc.umn.edu/archive/ebpgwiki/Charging.html</a><br>
<br>
<div class="moz-signature"> <br>
<font size="-2">--------------------------------<br>
Michael Rooks <br>
Yale Institute of Nanoscience and Quantum Engineering <br>
<a href="http://nano.yale.edu">nano.yale.edu</a>
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On 08/21/2017 12:26 PM, Jugessur, Aju S wrote:<br>
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<blockquote
cite="mid:072A267E-4725-4880-BFCE-CB65EB1B4EB5@uiowa.edu"
type="cite">
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Hi,
<div class=""><br class="">
</div>
<div class="">I have a user who is having inconsistent results
when exposing patterns (100-200 nm in size) on glass substrate.</div>
<div class="">He is using a 5 nm Al layer between the 100nm ZEP
and glass substrate. He obtained good results but it does not
seem reproducible all the times.</div>
<div class="">He is also ensuring that there is good contact
between the sample clips and the metal layer. Another approach
would be to place the metal on top of the resist.</div>
<div class=""><br class="">
</div>
<div class="">He has also used the conducting polymer PDOT on ZEP
but it does not seem to adhere too well. He could also be doing
a step or steps consistently wrong and be unaware.</div>
<div class=""><br class="">
</div>
<div class="">This is quite a common and established process but I
would like to see if the members have any suggestions to ensure
reproducible and consistent results for ebeam lithography on
glass substrates.</div>
<div class="">I will provide more information/details once I
receive some feedback.</div>
<div class=""><br class="">
</div>
<div class="">Thanks,</div>
<div class="">Regards</div>
<div class="">Aju</div>
<div class=""><br class="">
</div>
<div class=""><br class="">
</div>
<div class=""><br class="">
</div>
<div class=""><br class="">
<div class=""><i class=""><font class="" color="#0096ff">Aju
Jugessur, Ph.D.<br class="">
Director, University of Iowa Microfabrication Facility
(UIMF)<br class="">
Optical Science and Technology Center<br class="">
Professor Adjunct, Physics and Astronomy<br class="">
University of Iowa<br class="">
Office: IATL 202, Tel: 319-3532342<br class="">
Labs: IATL 170, 172, 174<br class="">
<a moz-do-not-send="true"
href="https://ostc.uiowa.edu/uimf" class="">https://ostc.uiowa.edu/uimf</a></font></i><br
class="">
<br class="">
<br class="">
<br class="">
<br class="">
<br class="">
</div>
<br class="">
</div>
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