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<p>Transene sells Si etchants and the condensing glassware to do
these types of jobs. <a class="moz-txt-link-freetext" href="http://transene.com/si/">http://transene.com/si/</a><br>
</p>
<br>
<div class="moz-cite-prefix">Le 11/08/2017 à 6:03 AM, Mathilde
Isabelle Barriet a écrit :<br>
</div>
<blockquote type="cite"
cite="mid:4e953489fda344f3adbcb0e6dadbc813@it-ex11.win.ntnu.no">
<pre wrap="">Dear All,
I have a user who wants to do KOH etch of silicon but since we do not have an established process in the lab, I am wondering if I could get some practical guidance on the best set ups.
Also, this user is especially concerned about contaminating his Si wafers with metals so I wonder what degree of purity of KOH is commonly used and if buying the best quality available make a difference on the Si contamination or not.
If anyone has experience with this, please let me know.
Thanks
Mathilde
Senior Engineer
NTNU NanoLab
----------------------------
Sem Sælands vei 14, K1-113
NO-7491 Trondheim
+47 91 89 72 08
<a class="moz-txt-link-abbreviated" href="http://www.ntnu.no/nanolab">www.ntnu.no/nanolab</a>
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</pre>
</blockquote>
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<p class="MsoNormal"><b style="mso-bidi-font-weight:normal">Mario
Beaudoin, Ph.D.<o:p></o:p></b></p>
<p class="MsoNormal">Research Associate<o:p></o:p></p>
<p class="MsoNormal">Advanced Nanofabrication Facility (ANF)<o:p></o:p></p>
<p class="MsoNormal">Advanced Materials and Process Engineering
Lab (AMPEL)<o:p></o:p></p>
<p class="MsoNormal">University of British Columbia<o:p></o:p></p>
<p class="MsoNormal">2355 East Mall, Vancouver, BC V6T 1Z4<o:p></o:p></p>
<p class="MsoNormal">Tel: 604-822-1853<o:p></o:p></p>
<p class="MsoNormal"><span class="GramE">web</span>: <a
href="www.nanofab.ubc.ca">www.nanofab.ubc.ca</a><o:p></o:p></p>
<p class="MsoNormal">Reply To: <a
href="mailto:beaudoin@physics.ubc.ca">beaudoin@physics.ubc.ca</a></p>
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