<html><head><meta http-equiv="content-type" content="text/html; charset=UTF-8"><style>body { line-height: 1.5; }blockquote { margin-top: 0px; margin-bottom: 0px; margin-left: 0.5em; }p { margin-top: 0px; margin-bottom: 0px; }div.foxdiv20170823134234438919 { }body { font-size: 10.5pt; font-family: 'Microsoft YaHei UI'; color: rgb(0, 0, 0); line-height: 1.5; }</style></head><body>
<div><span></span>Hi mario beaudoin and Mathilde Isabelle Barriet</div><div><br></div><div>The KOH etch condition used in my lab is 40% by weight and 50 degree Celsius.</div><div><br></div><div>You can get the etch rate by <span style="font-family: ''; font-size: 10.5pt; line-height: 1.5; background-color: window;"></span><a href="http://www.lelandstanfordjunior.com/KOH.html" microsoft="" yahei="" ui'";="" font-size:="" 14px;="" font-weight:="" normal;="" font-style:="" normal;'="" style="font-family: ''; font-size: 10.5pt; line-height: 1.5; background-color: window;">http://www.lelandstanfordjunior.com/KOH.html</a>, </div><div><img src="cid:_Foxmail.1@00aeb467-198f-63d4-a662-a241817e252d" border="0"></div><div><br></div><div>I use electronic grade KOH solution provided by China supplier, so I didn`t check the metal contamination. If you want to remove the potassium ion after the etch process is done, I recommend you put the wafer into hot or boiled water or SC-2 of the RCA clean.</div><div><br></div><div>Regards,</div><span style="font-family: "" microsoft="" yahei="" ui'";="" font-size:="" 14px;="" color:="" rgb(0,="" 0,="" 0);="" background-color:="" rgb(255,="" 255,="" 255);="" font-weight:="" normal;="" font-style:="" normal;text-decoration:="" none;'=""></span>
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<div><span><h4 class="name" style="font-family: Verdana; margin: 0px; line-height: 28px; zoom: 1;"><img src="https://exmail.qq.com/cgi-bin/viewfile?type=logo&domain=sustc.edu.cn"></h4><h4 class="name" style="font-family: Verdana; margin: 0px; line-height: 28px; zoom: 1;">陈宇龙(CHEN Yulong) <span style="background-color: rgba(0, 0, 0, 0); font-size: 10.5pt; line-height: 1.5;">PhD Student</span></h4><p class="position" style="font-family: Verdana; margin-right: 0px; margin-left: 0px; line-height: 22px; color: rgb(160, 160, 160);"></p><p class="department" style="font-family: Verdana; margin-right: 0px; margin-left: 0px; line-height: 22px; color: rgb(160, 160, 160);"><span style="color: rgb(160, 160, 160); background-color: rgba(0, 0, 0, 0);">Department of Materials Science and Engineering<br>SUSTech </span><span style="color: rgb(160, 160, 160); background-color: rgba(0, 0, 0, 0);"></span><span style="color: rgb(160, 160, 160); background-color: rgba(0, 0, 0, 0);"></span> <a href="http://www.sustc.edu.cn/en/">http://www.sustc.edu.cn/en/</a><span style="color: rgb(160, 160, 160); background-color: rgba(0, 0, 0, 0);"><br>Tel: +86-18589050065<br> </span></p>
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<blockquote style="margin-top: 0px; margin-bottom: 0px; margin-left: 0.5em;"><div> </div><div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm"><div style="PADDING-RIGHT: 8px; PADDING-LEFT: 8px; FONT-SIZE: 12px;FONT-FAMILY:tahoma;COLOR:#000000; BACKGROUND: #efefef; PADDING-BOTTOM: 8px; PADDING-TOP: 8px"><div><b>From:</b> <a href="mailto:beaudoin@physics.ubc.ca" style="color: blue; text-decoration: underline;">Mario Beaudoin</a></div><div><b>Date:</b> 2017-08-23 02:26</div><div><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" style="color: blue; text-decoration: underline;">labnetwork</a></div><div><b>Subject:</b> Re: [labnetwork] KOH etch of silicon</div></div></div><div><div class="FoxDiv20170823134234438919">
<p>Transene sells Si etchants and the condensing glassware to do
these types of jobs. <a class="moz-txt-link-freetext" href="http://transene.com/si/" style="color: blue; text-decoration: underline;">http://transene.com/si/</a><br>
</p>
<br>
<div class="moz-cite-prefix">Le 11/08/2017 à 6:03 AM, Mathilde
Isabelle Barriet a écrit :<br>
</div>
<blockquote type="cite" cite="mid:4e953489fda344f3adbcb0e6dadbc813@it-ex11.win.ntnu.no" style="margin-top: 0px;">
<pre wrap="">Dear All,
I have a user who wants to do KOH etch of silicon but since we do not have an established process in the lab, I am wondering if I could get some practical guidance on the best set ups.
Also, this user is especially concerned about contaminating his Si wafers with metals so I wonder what degree of purity of KOH is commonly used and if buying the best quality available make a difference on the Si contamination or not.
If anyone has experience with this, please let me know.
Thanks
Mathilde
Senior Engineer
NTNU NanoLab
----------------------------
Sem Sælands vei 14, K1-113
NO-7491 Trondheim
+47 91 89 72 08
<a class="moz-txt-link-abbreviated" href="http://www.ntnu.no/nanolab" style="color: blue; text-decoration: underline;">www.ntnu.no/nanolab</a>
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</pre>
</blockquote>
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<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;"><b style="mso-bidi-font-weight:normal">Mario
Beaudoin, Ph.D.<o:p></o:p></b></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">Research Associate<o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">Advanced Nanofabrication Facility (ANF)<o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">Advanced Materials and Process Engineering
Lab (AMPEL)<o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">University of British Columbia<o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">2355 East Mall, Vancouver, BC V6T 1Z4<o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">Tel: 604-822-1853<o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;"><span class="GramE">web</span>: <a href="www.nanofab.ubc.ca" style="color: blue; text-decoration: underline;">www.nanofab.ubc.ca</a><o:p></o:p></p>
<p class="MsoNormal" style="margin: 0cm 0cm 0.0001pt; font-size: 10pt; font-family: 'Times New Roman', serif;">Reply To: <a href="mailto:beaudoin@physics.ubc.ca" style="color: blue; text-decoration: underline;">beaudoin@physics.ubc.ca</a></p>
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