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Hi Fouad,<br>
<br>
We avoid S containing materials in our multi user tools, you will
get contamination. Sulfur has a high vapor pressure and if there is
any heating on the sputter chimney or if you have a substrate
heater, you will redeposit/redistribute S in the system and into
films. I have always used 1E-4 Torr as the "line in the sand" for
an elements vapor pressure vs temperature. Below this pressure,
there is a very small amount of flux from the element source. Above
this pressure, the element can produce a high enough flux for MBE
growth. On a vapor pressure/temperature curve, S has a vapor
pressure of 1E-4 Torr at the 50C-60C range and I would imaging that
the chimney and shutter will get hotter than that during a sputter
run.<br>
<br>
We have a Y2O3 target and we have no known issues with this
material. We do store our targets in a desiccator and Y2O3 is
hygroscopic, so you will want to keep it in a dry ambient when not
in the sputter tool.<br>
<br>
Best Regards,<br>
Brent<br>
<br>
<div class="moz-cite-prefix">On 8/23/2017 9:48 PM, Fouad Karouta
wrote:<br>
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<blockquote type="cite"
cite="mid:SYXPR01MB2157AE972273C4FB648D6C59C09A0@SYXPR01MB2157.ausprd01.prod.outlook.com">
<meta http-equiv="Content-Type" content="text/html;
charset=windows-1252">
<meta name="Generator" content="Microsoft Word 15 (filtered
medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0cm;
margin-right:0cm;
margin-bottom:0cm;
margin-left:36.0pt;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;
mso-fareast-language:EN-US;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:2016884054;
mso-list-type:hybrid;
mso-list-template-ids:807067766 829035770 201916441 201916443 201916431 201916441 201916443 201916431 201916441 201916443;}
@list l0:level1
{mso-level-text:%1-;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0cm;}
ul
{margin-bottom:0cm;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
<div class="WordSection1">
<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am looking for feedback about the use of
CuS and/or Y2O3 targets in a multi users facility.<o:p></o:p></p>
<p class="MsoListParagraph"
style="text-indent:-18.0pt;mso-list:l0 level1 lfo1"><!--[if !supportLists]--><span
style="mso-list:Ignore">1-<span style="font:7.0pt
"Times New Roman"">
</span></span><!--[endif]-->Is there any risk that CuS may
decompose during sputtering and contaminate the system with
sulphur?<o:p></o:p></p>
<p class="MsoListParagraph"
style="text-indent:-18.0pt;mso-list:l0 level1 lfo1"><!--[if !supportLists]--><span
style="mso-list:Ignore">2-<span style="font:7.0pt
"Times New Roman"">
</span></span><!--[endif]-->The SDS I consulted for Y2O3
mentioned some hazards and I wonder if there are experiences
with this material in the network especially if there are any
health concerns.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Fouad Karouta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Manager
ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Australian
National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Research
School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">L.
Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Australian
National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">ACT
0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Tel:
+ 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Mob:
+ 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="color:#1F497D;mso-fareast-language:EN-AU">Email:
<a href="mailto:fouad.karouta@anu.edu.au"
moz-do-not-send="true"><span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="color:#1F497D;mso-fareast-language:EN-AU"><a
href="http://anff-act.anu.edu.au/" moz-do-not-send="true"><span
style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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