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<p class="MsoNormal">Hi all,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am looking for feedback about the use of CuS and/or Y2O3 targets in a multi users facility.<o:p></o:p></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="mso-list:Ignore">1-<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>Is there any risk that CuS may decompose during sputtering and contaminate the system with sulphur?<o:p></o:p></p>
<p class="MsoListParagraph" style="text-indent:-18.0pt;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="mso-list:Ignore">2-<span style="font:7.0pt "Times New Roman"">
</span></span><![endif]>The SDS I consulted for Y2O3 mentioned some hazards and I wonder if there are experiences with this material in the network especially if there are any health concerns.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal">Fouad Karouta<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">*************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Manager ANFF ACT Node<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Australian National Fabrication Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Research School of Physics and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">L. Huxley Building (#56), Mills Road, Room 4.02<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Australian National University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">ACT 0200, Canberra, Australia<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Tel: + 61 2 6125 7174<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-AU">Mob: + 61 451 046 412<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-AU">Email:
<a href="mailto:fouad.karouta@anu.edu.au"><span style="color:blue">fouad.karouta@anu.edu.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D;mso-fareast-language:EN-AU"><a href="http://anff-act.anu.edu.au/"><span style="color:blue">http://anff-act.anu.edu.au/</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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