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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D">Hi Patrick,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D">We are currently operating two
<span class="SpellE">fabs</span>, one of which just opened this year.<span style="mso-spacerun:yes">
</span>Both <span class="SpellE">fabs</span> utilize a custom built PCW system, which means it is not as easy to go to a company for a maintenance agreement (note we did opt to do a 3yr service contract with the supplier of our new DI water skid, and I’d be
happy to discuss the reasoning behind this decision).<span style="mso-spacerun:yes">
</span>Therefore, we do most of the maintenance ourselves (especially in the old facility) or in collaboration with our Facilities group (especially for larger projects or for tuning/repair of controls).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D">In the new fab, I would say the general rule of thumb is that almost all components located in the cleanroom are maintained
by <span class="SpellE">Nanofab</span> staff and most components in the mechanical room are maintained with the assistance of Facilities.<span style="mso-spacerun:yes">
</span>For instance, filter changes, monitoring and calibration of the conductivity sensor, tie-ins to the cleanroom process tools, and most piping or valve maintenance on cleanroom laterals is handled by
<span class="SpellE">Nanofab</span> staff.<span style="mso-spacerun:yes"> </span>
Repairs or maintenance of the water pumps, heat exchangers, and PCW water mains are performed by our Facilities group (typically on a time and materials basis).<span style="mso-spacerun:yes">
</span>Our new system also includes redundant heat exchangers and pumps with automated valves that allow us to run one heat exchanger and pump at a time.<span style="mso-spacerun:yes">
</span>We rotate pumps and heat exchangers on a weekly basis.<span style="mso-spacerun:yes">
</span>This sequencing and the automated valves that control the crossover from one pump/exchanger to another are also maintained by our Facilities group.<span style="mso-spacerun:yes">
</span>The same is true for the automated sequencing and valves that control the PCW drain and DI fill sequence that is used to maintain water resistivity.<span style="mso-spacerun:yes">
</span>Despite a heavy reliance on our Facilities group for the larger components of the system, we still closely monitor everything and work with them as much as possible during any maintenance and repairs.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D">One additional item to note is that chilled water for all of our air handlers (makeup and recirculating air handlers included)
comes from a separate system and is maintained by Facilities.<span style="mso-spacerun:yes">
</span><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D">Hope this helps.<span style="mso-spacerun:yes">
</span>I would be happy to discuss any items further if needed.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><br>
Matt<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman";mso-bidi-font-family:"Times New Roman";color:#1F497D;mso-no-proof:yes">--
<br>
<b>Matthew T. Moneck, Ph.D.</b><br>
Executive Manager, Carnegie Mellon Nanofabrication Facility<br>
Electrical and Computer Engineering | Carnegie Mellon University<br>
5000 Forbes Ave., Pittsburgh, PA 15213-3890<br>
T: 412.268.5430<br>
F: 412.268.3497<br>
<a href="http://www.ece.cmu.edu"><span style="color:blue">www.ece.cmu.edu</span></a><br>
nanofab.ece.cmu.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-bidi-font-family:"Times New Roman";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman"">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;mso-fareast-font-family:"Times New Roman""> labnetwork-bounces@mtl.mit.edu
[mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Johnson, Patrick<br>
<b>Sent:</b> Wednesday, August 30, 2017 8:17 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] PCW Process Chilled Water Service support<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Good Morning, We are in the start up phase and bringing up the clean room tools and have encountered maintenance support issues with the PCW skid. Im curious to know how the other Nanofabs are handling the service of the PCW systems.
Thanks Patrick <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><br clear="all" style="mso-special-character:line-break">
<o:p></o:p></p>
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<p class="MsoNormal"><b><i>Patrick Johnson</i></b><o:p></o:p></p>
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<p class="MsoNormal"><i>George Washington University</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Nano Fabrication Lab Manager </i><o:p></o:p></p>
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<p class="MsoNormal"><i>Science and Engineering Hall</i><o:p></o:p></p>
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<p class="MsoNormal"><i>800 NW 22nd Street Rm-B2815</i><o:p></o:p></p>
</div>
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<p class="MsoNormal"><i>Washington D.C. 20052</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Cell 703 258 2465</i><o:p></o:p></p>
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<p class="MsoNormal"><i>Desk 202 994 2346</i><o:p></o:p></p>
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