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<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US">Dear Colleagues<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US">We consider purchasing a new dicing tool.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US">Today we have a Disco saw “DAD-2H/6” (1984) and a Dynatex “DX-III” (1993) diamond scribe and break system.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US">Approximately 95% of the dicing processing today is completed with the Dynatex diamond scriber.<o:p></o:p></span></p>
<p class="MsoNormal"><b><u><span lang="EN-US" style="mso-fareast-language:NO-BOK">Typical sample and material information<o:p></o:p></span></u></b></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">Wafer Substrate Material<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">GaAs, SiO2, Sapphire, Si3N4, Glass, steel alloy (only scribe), Quartz<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">Substrates dominant: Si<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">Wafer Thickness:<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">200 micrometer – 550 micrometer (Some samples down to 100 micrometer)<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">Glass slides up to 1mm (rarely).<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">Crystal Orientation:
<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">For Si mostly (100) but also (111)<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">Any “Sensitive Material” in the street:<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">Si nano- and microwires.<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">“Front side” Surface Coatings:<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">Nitride, oxide, common metals <1µm<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">“Back side” Surface Coatings:
<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">Nitride, oxide, common metals <1µm<o:p></o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="mso-fareast-language:NO-BOK">Wafer or Sample Dimensions:<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-US" style="mso-fareast-language:NO-BOK">Wafers (2” - 6”) and pieces/different shapes of wafers, like square 1x1 cm.
<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US">I want to check if any of you have recommendations whether we should go for a saw or a diamond scriber.
<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:106%"><span lang="EN-US">We are also interested in producers of this equipment.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thanks in advance.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Svenn Ove Linde<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">NTNU</span><span lang="EN-US" style="mso-fareast-language:NO-BOK"> -
</span><span lang="EN-US" style="color:#1F497D">Norwegian University of Science and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Faculty of Natural Sciences,</span><span lang="EN-US" style="mso-fareast-language:NO-BOK">
</span><span lang="EN-US" style="color:#1F497D">NanoLab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Sem Sælandsvei 14<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">NO-7491 Trondheim, Norway<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Homepage: www.ntnu.no/nanolab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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