<html><head><meta http-equiv="Content-Type" content="text/html charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class="">Svenn,<div class=""><br class=""></div><div class="">For scribing/notching, have a look at the Optophase MR 200:</div><div class=""><br class=""></div><div class=""><a href="http://www.optophase.com/Brochure/OEG/mr200_en_web.pdf" class="">http://www.optophase.com/Brochure/OEG/mr200_en_web.pdf</a></div><div class=""><br class=""></div><div class="">Loomis’ LSD-100 has also been a workhorse scribing/notching system:</div><div class=""><br class=""></div><div class=""><a href="http://www.loomisinc.com/downloads_www/Loomis_LSD-100_breaking.pdf" class="">http://www.loomisinc.com/downloads_www/Loomis_LSD-100_breaking.pdf</a></div><div class=""><br class=""></div><div class="">For wafer dicing, we use an ADT 7122: </div><div class=""><br class=""></div><div class=""><a href="http://www.adt-co.com/ADT2014/userdata/SendFile.asp?DBID=1&LNGID=1&GID=626" class="">http://www.adt-co.com/ADT2014/userdata/SendFile.asp?DBID=1&LNGID=1&GID=626</a></div><div class=""><br class=""><div class="">
<div style="color: rgb(0, 0, 0); letter-spacing: normal; orphans: auto; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; widows: auto; word-spacing: 0px; -webkit-text-stroke-width: 0px; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class=""><div style="orphans: auto; text-align: start; text-indent: 0px; widows: auto; word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space;" class=""><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;">Thank you,</div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;">Noah Clay</div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><br class=""></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">Noah Clay</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">Director, Quattrone Nanofabrication Facility</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">School of Engineering & Applied Science</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">University of Pennsylvania</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">Philadelphia, PA</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class=""><br class=""></i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class="">(215) 898-9308</i></div><div style="color: rgb(0, 0, 0); letter-spacing: normal; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><i class=""><a href="mailto:nclay@upenn.edu" class="">nclay@upenn.edu</a></i></div></div></div>
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<br class=""><div><blockquote type="cite" class=""><div class="">On Sep 5, 2017, at 5:07 AM, Svenn Ove Linde <<a href="mailto:svenn.linde@ntnu.no" class="">svenn.linde@ntnu.no</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div class="WordSection1" style="page: WordSection1; font-family: Helvetica; font-size: 12px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px;"><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class="">Dear Colleagues<o:p class=""></o:p></span></p><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class="">We consider purchasing a new dicing tool.<o:p class=""></o:p></span></p><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class="">Today we have a Disco saw “DAD-2H/6” (1984) and a Dynatex “DX-III” (1993) diamond scribe and break system.<o:p class=""></o:p></span></p><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class="">Approximately 95% of the dicing processing today is completed with the Dynatex diamond scriber.<o:p class=""></o:p></span></p><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><u class=""><span lang="EN-US" class="">Typical sample and material information<o:p class=""></o:p></span></u></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">Wafer Substrate Material<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">GaAs, SiO2, Sapphire, Si3N4, Glass, steel alloy (only scribe), Quartz<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Substrates dominant: Si<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">Wafer Thickness:<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">200 micrometer – 550 micrometer (Some samples down to 100 micrometer)<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Glass slides up to 1mm (rarely).<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">Crystal Orientation:<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">For Si mostly (100) but also (111)<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">Any “Sensitive Material” in the street:<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Si nano- and microwires.<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">“Front side” Surface Coatings:<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Nitride, oxide, common metals <1µm<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">“Back side” Surface Coatings:<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Nitride, oxide, common metals <1µm<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><b class=""><span lang="EN-US" class="">Wafer or Sample Dimensions:<o:p class=""></o:p></span></b></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Wafers (2” - 6”) and pieces/different shapes of wafers, like square 1x1 cm.<o:p class=""></o:p></span></div><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class=""><o:p class=""> </o:p></span></p><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class="">I want to check if any of you have recommendations whether we should go for a saw or a diamond scriber.<o:p class=""></o:p></span></p><p class="MsoNormal" style="margin: 0cm 0cm 8pt; font-size: 11pt; font-family: Calibri, sans-serif; line-height: 15.546667098999023px;"><span lang="EN-US" class="">We are also interested in producers of this equipment.<o:p class=""></o:p></span></p><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class="">Thanks in advance.<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" class=""><o:p class=""> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">Best regards,<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">Svenn Ove Linde<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">NTNU</span><span lang="EN-US" class=""><span class="Apple-converted-space"> </span>-<span class="Apple-converted-space"> </span></span><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">Norwegian University of Science and Technology<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">Faculty of Natural Sciences,</span><span lang="EN-US" class=""><span class="Apple-converted-space"> </span></span><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">NanoLab<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">Sem Sælandsvei 14<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class="">NO-7491 Trondheim, Norway<o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span lang="EN-US" style="color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span style="color: rgb(31, 73, 125);" class="">Homepage: <span class="Apple-converted-space"> </span><a href="http://www.ntnu.no/nanolab" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">www.ntnu.no/nanolab</a><o:p class=""></o:p></span></div><div style="margin: 0cm 0cm 0.0001pt; font-size: 11pt; 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