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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Svenn,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> I must agree with Mr. Clay’s choices in scribing/dicing equipment. I do have one concern though; when harvesting die from a toxic compound such as GaAs, sawing
the wafer will put toxins into the water stream therefore scribing/breaking is the preferred method.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Noah Clay<br>
<b>Sent:</b> Tuesday, September 05, 2017 6:05 PM<br>
<b>To:</b> Svenn Ove Linde<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Dicing tool, saw or diamond scribe & break? Producers?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Svenn,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">For scribing/notching, have a look at the Optophase MR 200:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.optophase.com_Brochure_OEG_mr200-5Fen-5Fweb.pdf&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=cJHFZ3UBE6vSC9RsvTYCJ5Pj11cW_ts5rvt0enn30Ko&s=DkQq6bFZTIrbtnDdfgTo4XH7QCZ_r_mbDtLSiNn2cik&e=">http://www.optophase.com/Brochure/OEG/mr200_en_web.pdf</a><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Loomis’ LSD-100 has also been a workhorse scribing/notching system:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.loomisinc.com_downloads-5Fwww_Loomis-5FLSD-2D100-5Fbreaking.pdf&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=cJHFZ3UBE6vSC9RsvTYCJ5Pj11cW_ts5rvt0enn30Ko&s=RSyVae6xaqniKeEp0PB5y6vzmRr3_9eBcIsldUMlddg&e=">http://www.loomisinc.com/downloads_www/Loomis_LSD-100_breaking.pdf</a><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">For wafer dicing, we use an ADT 7122: <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.adt-2Dco.com_ADT2014_userdata_SendFile.asp-3FDBID-3D1-26LNGID-3D1-26GID-3D626&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=cJHFZ3UBE6vSC9RsvTYCJ5Pj11cW_ts5rvt0enn30Ko&s=Ev-jQiL7OK-VEnlpc_XNTkkF-Q-eiRZDkIPzOhB3sw8&e=">http://www.adt-co.com/ADT2014/userdata/SendFile.asp?DBID=1&LNGID=1&GID=626</a><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:black">Thank you,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Noah Clay<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">Noah Clay</span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">Director, Quattrone Nanofabrication Facility</span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">School of Engineering & Applied Science</span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">University of Pennsylvania</span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">Philadelphia, PA</span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black">(215) 898-9308</span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><i><span style="color:black"><a href="mailto:nclay@upenn.edu">nclay@upenn.edu</a></span></i><span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">On Sep 5, 2017, at 5:07 AM, Svenn Ove Linde <<a href="mailto:svenn.linde@ntnu.no">svenn.linde@ntnu.no</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Dear Colleagues<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">We consider purchasing a new dicing tool.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Today we have a Disco saw “DAD-2H/6” (1984) and a Dynatex “DX-III” (1993) diamond scribe and break system.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Approximately 95% of the dicing processing today is completed with the Dynatex diamond scriber.<o:p></o:p></span></p>
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<p class="MsoNormal"><b><u><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Typical sample and material information</span></u></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Wafer Substrate Material</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">GaAs, SiO2, Sapphire, Si3N4, Glass, steel alloy (only scribe), Quartz<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Substrates dominant: Si<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Wafer Thickness:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">200 micrometer – 550 micrometer (Some samples down to 100 micrometer)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Glass slides up to 1mm (rarely).<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Crystal Orientation:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">For Si mostly (100) but also (111)<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Any “Sensitive Material” in the street:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Si nano- and microwires.<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">“Front side” Surface Coatings:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Nitride, oxide, common metals <1µm<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">“Back side” Surface Coatings:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Nitride, oxide, common metals <1µm<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Wafer or Sample Dimensions:</span></b><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Wafers (2” - 6”) and pieces/different shapes of wafers, like square 1x1 cm.<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">I want to check if any of you have recommendations whether we should go for a saw or a diamond scriber.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:11.65pt"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">We are also interested in producers of this equipment.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Thanks in advance.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Best regards,</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Svenn Ove Linde</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">NTNU</span><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">-<span class="apple-converted-space"> </span><span style="color:#1F497D">Norwegian
University of Science and Technology</span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Faculty of Natural Sciences,</span><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> </span></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">NanoLab</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Sem Sælandsvei 14</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">NO-7491 Trondheim, Norway</span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"> </span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Homepage: <span class="apple-converted-space"> </span><a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__www.ntnu.no_nanolab&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=cJHFZ3UBE6vSC9RsvTYCJ5Pj11cW_ts5rvt0enn30Ko&s=r4l5lY77L0m5xwi16jiAEO8H6aGPXv65J79f76zxDG0&e="><span style="color:#954F72">www.ntnu.no/nanolab</span></a></span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""> <o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Helvetica","sans-serif"">_______________________________________________<br>
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