<div dir="ltr"><div>Dear colleagues, </div><div><br></div><div>We have recently had a request to deposit carbon via electron-beam evaporation, to create thin (≤10 nm) films of diamond-like carbon.  We are an open-access nanofabrication/characterization centre in a university setting, so cross-contamination is a concern.  However, in addition to our workhorse e-beam evaporators, we have an under-utilised cryo-pumped e-beam system, the chamber of which is typically lined with Al foil, and I am considering using this system for this carbon deposition.  It has historically only been used for metal and Si deposition.  Given that the foil is replaced frequently, I would hope that this would mitigate chamber contamination.  </div><div><br></div><div>Are there any other concerns with carbon deposition via e-beam evaporation that I should be aware of?  Any advice/wisdom/tips and tricks would be appreciated.  Many thanks.</div><div><br></div><div>Cheers, </div><div><br></div><div> – Aaron</div><br clear="all"><div><div class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><u style="font-size:x-small">  </u><span style="font-size:x-small">                                           </span><br></div><div><span style="font-size:12.8px"><font size="1"><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Aaron Hryciw, PhD, PEng</span></p><p style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="color:rgb(0,0,0);font-family:Arial;white-space:pre-wrap;line-height:1.38;background-color:transparent">Fabrication Group Manager</span><br></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">University of Alberta - nanoFAB</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">W1-060 ECERF Building</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">9107 - 116 Street</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Edmonton, Alberta</span></p><p dir="ltr" style="line-height:1.38;margin-top:0pt;margin-bottom:0pt"><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Canada T6G 2V4 </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">  </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">                </span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">Ph: 780-940-7938</span></p><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent"><a href="http://www.nanofab.ualberta.ca/" style="color:rgb(17,85,204)" target="_blank">www.nanofab.ualberta.ca</a></span><span style="font-family:Arial;color:rgb(0,0,0);vertical-align:baseline;white-space:pre-wrap;background-color:transparent">  </span></font></span><font color="#000000"><br></font><br></div></div></div></div></div></div></div></div></div></div></div></div>
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