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Kevin,
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<div class="">We have the latest Raith Voyager and also commissioned the Vistec 5000plus at UofT.</div>
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<div class="">If you want to discuss these tools, it might be best to chat offline.</div>
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<div class="">Thanks</div>
<div class="">Aju</div>
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<div class="">On Oct 3, 2017, at 6:50 AM, Kevin McPeak <<a href="mailto:kmcpeak@lsu.edu" class="">kmcpeak@lsu.edu</a>> wrote:</div>
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<div class="">Dear Colleagues,<br class="">
<br class="">
My colleagues at Tulane University and I recently were awarded an NSF<br class="">
MRI grant for an E-beam lithography system. We are currently looking<br class="">
at two different suppliers for this system, Raith and Elionix. For<br class="">
Raith we are looking at their Voyager100 (50 kV) and E-Line Plus (30<br class="">
kV) systems and for Elionix we are looking at their latest ELS-S50EX<br class="">
(50 kV) model. All three systems have been placed within our budget.<br class="">
<br class="">
Our group of e-beam writers is interested in achieving both large<br class="">
single field sizes of periodic arrays of nanostructures (e.g. ~200 nm<br class="">
features over 500 um x 500 um region) and excellent stitching accuracy<br class="">
for writing 5 mm x 5 mm arrays of nanostructures.<br class="">
<br class="">
I would appreciate any input you have on using Raith and Elionix<br class="">
systems for high-performance e-beam writing (i.e. custom support,<br class="">
usability, uptime, etc.)<br class="">
<br class="">
Thank you.<br class="">
<br class="">
Regards,<br class="">
Kevin<br class="">
<br class="">
-- <br class="">
Kevin M. McPeak<br class="">
Assistant Professor<br class="">
Louisiana State University<br class="">
Dept. of Chemical Engineering<br class="">
110 Chemical Engineering Bldg Room 324<br class="">
S. Stadium Drive<br class="">
Baton Rouge, LA 70803<br class="">
email: <a href="mailto:kmcpeak@lsu.edu" class="">kmcpeak@lsu.edu</a><br class="">
phone: 225-578-0058<br class="">
<br class="">
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<div class=""><i class=""><font color="#0096ff" class="">Aju Jugessur, Ph.D.<br class="">
Director, University of Iowa Microfabrication Facility (UIMF)<br class="">
Optical Science and Technology Center<br class="">
Professor Adjunct, Physics and Astronomy<br class="">
University of Iowa<br class="">
Office: IATL 202, Tel: 319-3532342<br class="">
Labs: IATL 170, 172, 174<br class="">
<a href="https://ostc.uiowa.edu/uimf" class="">https://ostc.uiowa.edu/uimf</a></font></i><br class="">
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