<div dir="ltr">Dear Kelvin,<div><br></div><div>We are using Raith-Eline(30kV) system from past eight years. Service support from Raith is very good. Critical dimensions will be possible better than your listed values.</div><div><br></div><div><br></div><div>Thanks&Regards</div><div>Sreedhar</div></div><div class="gmail_extra"><br><div class="gmail_quote">On Thu, Oct 5, 2017 at 11:38 PM, Jugessur, Aju S <span dir="ltr"><<a href="mailto:aju-jugessur@uiowa.edu" target="_blank">aju-jugessur@uiowa.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
<div style="word-wrap:break-word">
Kevin,
<div><br>
</div>
<div>We have the latest Raith Voyager and also commissioned the Vistec 5000plus at UofT.</div>
<div><br>
</div>
<div>If you want to discuss these tools, it might be best to chat offline.</div>
<div><br>
</div>
<div>Thanks</div>
<div>Aju</div>
<div><div><div class="h5"><br>
<div>
<blockquote type="cite">
<div>On Oct 3, 2017, at 6:50 AM, Kevin McPeak <<a href="mailto:kmcpeak@lsu.edu" target="_blank">kmcpeak@lsu.edu</a>> wrote:</div>
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<div>Dear Colleagues,<br>
<br>
My colleagues at Tulane University and I recently were awarded an NSF<br>
MRI grant for an E-beam lithography system. We are currently looking<br>
at two different suppliers for this system, Raith and Elionix. For<br>
Raith we are looking at their Voyager100 (50 kV) and E-Line Plus (30<br>
kV) systems and for Elionix we are looking at their latest ELS-S50EX<br>
(50 kV) model. All three systems have been placed within our budget.<br>
<br>
Our group of e-beam writers is interested in achieving both large<br>
single field sizes of periodic arrays of nanostructures (e.g. ~200 nm<br>
features over 500 um x 500 um region) and excellent stitching accuracy<br>
for writing 5 mm x 5 mm arrays of nanostructures.<br>
<br>
I would appreciate any input you have on using Raith and Elionix<br>
systems for high-performance e-beam writing (i.e. custom support,<br>
usability, uptime, etc.)<br>
<br>
Thank you.<br>
<br>
Regards,<br>
Kevin<br>
<br>
-- <br>
Kevin M. McPeak<br>
Assistant Professor<br>
Louisiana State University<br>
Dept. of Chemical Engineering<br>
110 Chemical Engineering Bldg Room 324<br>
S. Stadium Drive<br>
Baton Rouge, LA 70803<br>
email: <a href="mailto:kmcpeak@lsu.edu" target="_blank">kmcpeak@lsu.edu</a><br>
phone: 225-578-0058<br>
<br>
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</div>
</div>
</blockquote>
</div>
<br>
</div></div><div><i><font color="#0096ff">Aju Jugessur, Ph.D.<br>
Director, University of Iowa Microfabrication Facility (UIMF)<br>
Optical Science and Technology Center<br>
Professor Adjunct, Physics and Astronomy<br>
University of Iowa<br>
Office: IATL 202, Tel: 319-3532342<br>
Labs: IATL 170, 172, 174<br>
<a href="https://ostc.uiowa.edu/uimf" target="_blank">https://ostc.uiowa.edu/uimf</a></font></i><br>
<br>
<br>
<br>
<br>
<br>
</div>
<br>
</div>
</div>
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<br></blockquote></div><br><br clear="all"><div><br></div>-- <br><div class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><font size="1" color="#3d85c6"><b>Thanks&Regards</b></font><div><font size="1" color="#3d85c6"><b><br></b></font></div><div><font size="1" color="#3d85c6"><b>K.Sreedhar Babu</b></font></div><div><font size="1" color="#3d85c6"><b>Sr.Facility Technologist</b></font></div><div><font size="1" color="#3d85c6"><b>National Nano Fabrication Centre</b></font></div><div><font size="1" color="#3d85c6"><b>Center For Nano Science And Engineering</b></font></div><div><font size="1" color="#3d85c6"><b>Indian Institute Of Science</b></font></div><div><font size="1" color="#3d85c6"><b>Bengaluru-560012</b></font></div><div><font size="1" color="#3d85c6"><b><br></b></font></div><div><font size="1" color="#3d85c6"><b>Mobile: +91 9492946127</b></font></div><div><font size="1" color="#3d85c6"><b>email: sreedhar@</b><span style="line-height:16px;white-space:nowrap;background-color:rgb(255,255,255)"><b><a href="http://cense.iisc.ernet.in" target="_blank">cense.iisc.ernet.in</a> </b></span></font></div></div></div></div></div>
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