<html>
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-8859-1">
<style type="text/css" style="display:none;"><!-- P {margin-top:0;margin-bottom:0;} --></style>
</head>
<body dir="ltr">
<div id="divtagdefaultwrapper" style="font-size: 12pt; color: rgb(0, 0, 0); font-family: Calibri,Helvetica,sans-serif,"EmojiFont","Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols;" dir="ltr">
<p>Hi all,</p>
<p><br>
</p>
<p>We have a lot of BOE(13:2) solution expired in 2014, which has been seeing declining oxide etch rates since sometime. Is there some way of improving the etch rate, like by adding fresh HF (50%).</p>
<p><br>
</p>
<p>Kindly let me know if anyone has information on this.</p>
<p><br>
</p>
<p>Regards,</p>
<p><br>
</p>
<p>Savitha<br>
</p>
<p>________________________________<br>
</p>
<div id="Signature">
<div id="divtagdefaultwrapper" dir="ltr" style="font-size: 12pt; color: rgb(0, 0, 0); font-family: Calibri,Helvetica,sans-serif,"EmojiFont","Apple Color Emoji","Segoe UI Emoji",NotoColorEmoji,"Segoe UI Symbol","Android Emoji",EmojiSymbols;">
<p></p>
<div>Dr. Savitha P<br>
Chief Operating Officer<br>
National Nanofabrication Centre<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph. +91 80 2293 3254<br>
www.cense.iisc.ac.in</div>
<i><span style="color:rgb(0,111,201)"><b>*Please note the change in my e-mail id*</b></span></i><br>
<p></p>
</div>
</div>
</div>
</body>
</html>