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<font face="Times New Roman, Times, serif">Hi Savitha,<br>
<br>
I don't have personal experience with old BOE, but since HF is
made by bubbling HF gas through water, I would expect the HF gas
to come out of solution and evaporate over time, lowering the HF
concentration. If the bottles have been sealed, I don't know why
it would weaken.<br>
<br>
While adding fresh 49% HF to the existing stock would increase the
etch rate, figuring out the concentration of your "resultant"
mixture would be challenging, since you don't know the current
(weakened) concentration.<br>
<br>
If you are doing an etch where knowing the precise etch rate is
important, you might try just doing a rate test on each bottle as
it is opened and put into use, marking the rate on the side of the
bottle, and letting that suffice.<br>
<br>
I am unaware of any other issues that can arise from the use of
old HF or BOE, such as surface roughening, or things like that.
Other more experienced hands will no doubt weigh in...<br>
<br>
<br>
Mac<br>
<br>
</font>
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On 10/9/2017 1:05 PM, Savitha P wrote:
<blockquote
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<p>Hi all,</p>
<p><br>
</p>
<p>We have a lot of BOE(13:2) solution expired in 2014, which
has been seeing declining oxide etch rates since sometime. Is
there some way of improving the etch rate, like by adding
fresh HF (50%).</p>
<p><br>
</p>
<p>Kindly let me know if anyone has information on this.</p>
<p><br>
</p>
<p>Regards,</p>
<p><br>
</p>
<p>Savitha<br>
</p>
<p>________________________________<br>
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<div>Dr. Savitha P<br>
Chief Operating Officer<br>
National Nanofabrication Centre<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph. +91 80 2293 3254<br>
<a class="moz-txt-link-abbreviated" href="http://www.cense.iisc.ac.in">www.cense.iisc.ac.in</a></div>
<i><span style="color:rgb(0,111,201)"><b>*Please note the
change in my e-mail id*</b></span></i><br>
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