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<p>We use BOE, 6:1 or 20:1 occasionally. We have actually kept a batch for a few years with little degradation in etch rates. We add water to keep the level constant. </p>
<p><br>
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Kind Regards,
<div><br>
</div>
<div>Matthias Pleil, Ph.D.</div>
<div>Research Professor & Lecturer III of Mech. Eng - UNM</div>
<div>UNM MTTC Cleanroom Manager</div>
<div>PI - Southwest Center for Microsystems Education</div>
<div>scme-nm.org</div>
<div>(505)272-7157</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Savitha P <savithap@iisc.ac.in><br>
<b>Sent:</b> Tuesday, October 10, 2017 10:05:49 PM<br>
<b>To:</b> Mac Hathaway; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Etch rate of expired BOE solution</font>
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<p>Hi Mac:</p>
<p><br>
</p>
<p>We have been doing test pieces to find the etch rate every week, but have been seeing it going down, hence the thought of adding fresh HF.</p>
<p><br>
</p>
<p>Thank you for your suggestions.</p>
<p><br>
</p>
<p>Regards,</p>
<p><br>
</p>
<p>Savitha</p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> Mac Hathaway <hathaway@cns.fas.harvard.edu><br>
<b>Sent:</b> Tuesday, October 10, 2017 7:42:31 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu; Savitha P<br>
<b>Subject:</b> Re: [labnetwork] Etch rate of expired BOE solution</font>
<div> </div>
</div>
<div><font face="Times New Roman, Times, serif">Hi Savitha,<br>
<br>
I don't have personal experience with old BOE, but since HF is made by bubbling HF gas through water, I would expect the HF gas to come out of solution and evaporate over time, lowering the HF concentration. If the bottles have been sealed, I don't know why
it would weaken.<br>
<br>
While adding fresh 49% HF to the existing stock would increase the etch rate, figuring out the concentration of your "resultant" mixture would be challenging, since you don't know the current (weakened) concentration.<br>
<br>
If you are doing an etch where knowing the precise etch rate is important, you might try just doing a rate test on each bottle as it is opened and put into use, marking the rate on the side of the bottle, and letting that suffice.<br>
<br>
I am unaware of any other issues that can arise from the use of old HF or BOE, such as surface roughening, or things like that. Other more experienced hands will no doubt weigh in...<br>
<br>
<br>
Mac<br>
<br>
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<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Mac Hathaway<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Senior Process and Systems Engineer<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Harvard Center for
<span class="SpellE">Nanoscale</span> Systems<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">Cambridge, MA<span style="mso-spacerun:yes">
</span>02138<o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:0in;margin-bottom:.0001pt"><span style="font-size:12.0pt;line-height:115%;font-family:"Times
New Roman","serif"">617-495-9012<o:p></o:p></span></p>
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normal">
<span style="font-size:12.0pt;font-family:"Times
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<br>
On 10/9/2017 1:05 PM, Savitha P wrote:
<blockquote cite="mid:MA1PR0101MB1560061917180499D4CBFD41EF740@MA1PR0101MB1560.INDPRD01.PROD.OUTLOOK.COM" type="cite">
<style type="text/css" style="display:none;"><!-- P {margin-top:0;margin-bottom:0;} --></style>
<div id="divtagdefaultwrapper" style="font-size: 12pt; color:
rgb(0, 0, 0); font-family:
Calibri,Helvetica,sans-serif,"EmojiFont","Apple
Color Emoji","Segoe UI
Emoji",NotoColorEmoji,"Segoe UI
Symbol","Android Emoji",EmojiSymbols;" dir="ltr">
<p>Hi all,</p>
<p><br>
</p>
<p>We have a lot of BOE(13:2) solution expired in 2014, which has been seeing declining oxide etch rates since sometime. Is there some way of improving the etch rate, like by adding fresh HF (50%).</p>
<p><br>
</p>
<p>Kindly let me know if anyone has information on this.</p>
<p><br>
</p>
<p>Regards,</p>
<p><br>
</p>
<p>Savitha<br>
</p>
<p>________________________________<br>
</p>
<div id="Signature">
<div id="divtagdefaultwrapper" dir="ltr" style="font-size:
12pt; color: rgb(0, 0, 0); font-family:
Calibri,Helvetica,sans-serif,"EmojiFont","Apple
Color Emoji","Segoe UI
Emoji",NotoColorEmoji,"Segoe UI
Symbol","Android Emoji",EmojiSymbols;">
<div>Dr. Savitha P<br>
Chief Operating Officer<br>
National Nanofabrication Centre<br>
Centre for Nanoscience and Engineering<br>
Indian Institute of Science<br>
Bangalore - 560012<br>
India.<br>
Ph. +91 80 2293 3254<br>
<a class="moz-txt-link-abbreviated" href="http://www.cense.iisc.ac.in">www.cense.iisc.ac.in</a></div>
<i><span style="color:rgb(0,111,201)"><b>*Please note the change in my e-mail id*</b></span></i><br>
</div>
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<br>
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<pre wrap="">_______________________________________________
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